LEC-T1_C

I/O LEC-CN5-* 1 1 PLC 3 DC24V CN5 CN4 CN3 1 2 LE-C*-*-* LE-C*-*-S 120.3 120.3 mm mm CN2 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 CN1 50 200 50 200 3 3 <> AWG20 (0.5mm 2) 3 DC24V USB (A-miniB type) USB LEC-W2 3m :LEC-T1-3JG* 1 2 1.2 http://www.smcworld.com/ 3 UL,UL1310Class2 7 USB LAN 16 - 5. 1 2 CN4 5.1 3 ,5.2 4 LECPA 5.3(1) 5.3(2)

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(mm) DProtrusion In-line Perpendicular Auto switch model D-M9 D-F9W D-M9V D-F9WV 20Air gripper model Switch reset position (OFF) O MHY2-10D S 3 1 O Hysteresis MHY2-16D S 3 1 O Hysteresis MHY2-20D S Switch operating position (ON) Switch operating position (ON) O MHY2-25D Switch reset position (OFF) S D-F9W(V) D-M9(V) Red light at ON Green light at ON 2 2 4 Finger fully closed MHY2

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

(mm) DProtrusion In-line Perpendicular Auto switch model D-M9 D-F9W D-M9V D-F9WV 20Air gripper model Switch reset position (OFF) O MHY2-10D S 3 1 O Hysteresis MHY2-16D S 3 1 O Hysteresis MHY2-20D S Switch operating position (ON) Switch operating position (ON) O MHY2-25D Switch reset position (OFF) S D-F9W(V) D-M9(V) Red light at ON Green light at ON 2 2 4 Finger fully closed MHY2

High Power Cylinder:

/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Compact Type Dual-Rod Cylinder Series CXSJ

to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) PB PA A B (mm) Dimensions U S T U Model LVD2-S LVD3-S LVD4-S LVD5-S 11.5 28 9.6 26 34 17.5 26 35 20 29.5 57 25 17-5-49 8 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option combinations.

Pneumatic Purification

512 5.5 6.0 23.6 78.7 55.1 19.7 19.7 460/3/60 2-1/2 NPT 174 R134a 680 3 1/2 PDE180-S 654 5.7 6.2 23.6 78.7 55.1 19.7 19.7 460/3/60 2-1/2 NPT 174 R134a 790 3 1/2 PDE200-S 742 6.2 7.0 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 890 3 3/4 PDE260-S 1007 7.5 8.5 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 990 5 PDE310-S 1200 7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

O

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

O

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

ITV-E

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

CC-Link-E

RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y. The pressure i s set by b15, b1, b0 dat a. ( b11 b0 cover 100% F. S. ) The l i m i t i s 1198h, dat a of 110% , but t he guarant eed accuracy i s up t o 100% F. S.

TABLE OF CONTENTS

U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

CQS

3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !3 contained in one kit, and can be ordered using the kit number for each respective tube bore size. Seal kits consist of items !2, !3 and !

RSQ

3 !2 !1 w o @0 !7 i !9 !

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.