Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

ZP

Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

Table of Contents

Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series

Air Slide Table

MXQ 20-mm4 With buffer, end lock (20) Q J 5 9.5 16.2 10 10 0.5 Pilot port 2 x M5 x 0.8 32 3 72 Height interchangeable type MXQ 53 42 60 MXQ20-10Z4 Dimensions [mm] Model J Q Standard type Shorter total length type ZZ M M MXQ20-10Zl4 91.5 44.5 3 2 x M5 x 0.8 thread depth 7 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) 3 M 131 113.5 121.5 MXQ20-20Zl4 141 123.5 MXQ20-30Zl4 101.5 151 133.5

EX510

example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14

Vacuum System Peripherals:

2 to 10 stations Both sides D side D B Double wiring specifications 08 2 to 16 stations 8 SUP/EXH block assembly specifications 09 9 Can accommodate up to 17 solenoids.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber VQZ200 Rubber Metal VQZ300 Rubber Metal Note: The base mounted and body ported manifolds for the VQZ 100/200/300 are stocked in inch porting as part of the P.O.P. 7 Q Q Q Base Mounted Q Q Series VQZ100200300 Q Q Q Q Q Q Q Specifications Q Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 10 Manifold . . . . . .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

High Flow/ Power Saving Type Ep. 7 Ep. 9 Ep. 11 How to Order JSX 2 1U S N 403 R 5 GS B w y e r t u o i q U High flow type q Size w Valve type e Body material i Electrical entry Symbol Size 1 10 2 20 3 30 Symbol Valve type Symbol Body material S Stainless steel C Brass Symbol Electrical entry Size CE/UKCAcompliant 10 20 30 2(OUT) 1 N.C.

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

NCQ8

2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 #6-32UNC1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4 1/2 5 5-1/2 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Series CQ2W/CDQ2W Dimensions: 32 to 50/With Auto Switch Both Ends Tapped Style Basic style (Through-hole): CQ2WB/CDQ2WB Both ends tapped style: CQ2WA Bore size (mm) O1 R R R O1 thread 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 2-H thread effective depth C (opposite side also) 2-P (Port size) U 4-N through-hole Q Q 8-O counterbore 1 Width across flats K 11 Lead wire Minimum lead wire bending

7

2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Auto Switch Guide

2-color indication with diagnostic output Grommet Band 10-20-51 MK(2) Grommet Rail 10-20-52 Grommet Tie-rod 10-20-53 RS Q G Water (coolant) resistant type D-H7BAL D-G5BAL D-F7BAL D-F7BAVL D-F5BAL D-F9BAL D-Y7BAL 10-20-54 RS H A Band Grommet Water resistant 2-color indication 10-20-55 Solid state switch RZQ 10-20-56 Rail Grommet 10-20-57 Tie-rod Grommet MI W S 10-20-58 Direct Grommet CEP1

15

FJ FF 2 x FA thread depth FB FJ FC Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH FJ FK M1 M2 PD NZ 2 x M4 x 0.7 7.5 46 30 3.7 11 42 M2.5 x 10 M3 x 8 8 NY 2 x M3 x 0.5 5.5 45 30 5 11 38 M2.5 x 10 M3 x 8 8 NX 2 x M4 x 0.7 7 46 30 3.7 8 42 M2.5 x 10 M3 x 8 8 NM2 3.4 31 28 8.5 7 3.5 42 M2.5 x 10 M3 x 8 6 25 NZ 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2

JIS Standard Hydraulic Cylinder

115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2) (n = 2, 3, 4) 105 + 100 (n 2) (n = 2, 3, 4) Different surfaces D-G39 D-K39 D-A3 Note 1) n 100 + 100 (n 2) (n = 2, 3, 4) same surface 1 95 115 105 80 10 35 55 Different surfaces same surface 2 110 100 85 120 35 + 30 (n 2) (n = 2, 3, 4) 85 + 30 (n 2