IDG

(Maintenance space 100 mm or more) Purge air discharge tubing port for dehumidification Applicable tubing I.D. : 19 (NPT threads: 3/4 inch) With float type auto-drain With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 IDG60M/60HM IDG75M/75HM/100M/100HM 191 186 101 80 365 204 202 104 90 368 241 262 16 19 129 147 7 9 95 108 50 55 22 25 3/8, 1/2 1/2 14-19-42 39 Series

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

39

L M N O P Q R K L M N O P Q Part no.

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

REC

Use NA when design pivot bracket. 10-2-99 13 Series REC Construction !7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty.

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Series MXP Precision Air Slide Table

Q Q Q MXP Series Q Q Q Product Features .pages 158-159 Q Q MXP Series Q How to Order .page 160 Q Specifications .page 161 Q Table Accuracy .page 162 Q How to Select .pages 163-164 Q Table Deflection .page 165 Q Construction/ Parts List, Seal Kits .page 166 Q Dimensional Drawings.pages 167-170 Q Auto Switch Specifications and Mounting.pages 171 Q Please see

ITV

Note 4) Note 5) Graph (1) Input/output characteristics chart How to Order ITV 3 0 Q 1 0 S 0 1 2 CE compliance Model Pressure display unit Pressure range Note 1) Q 1 2 3 1000 2000 3000 MPa kgf/cm2 bar PSI kPa 2 3 4 5 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa CE compliant Please visit our SMC homepage: http://www.smcworld.com for the latest details on our CE compliant products.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) Option B, G, H are not assembled and supplied loose at the time of shipment. Note 3) Assembly of a bracket and set nuts (10-/21-AR20(K)-B to AR40(K)-B) Including 2 mounting screws for the 10-/21-AR50(K)-B, AR60(K)-B Note 4) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0.1 to 1 MPa M For positive pressure ISE20B M5 X For vacuum/ compound pressure ZSE20B X M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 101 kPa ZSE20BF 100 to 100 kPa Symbol Description R NPN open collector 2 outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20