CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Table of Contents

10 16 10 17 24 14 19 25 20 22 20 22.5 20.5 23 21.5 23.5 24.5 22.5 24.5 25.5 21 1 8 17.5 2.5 15.5 10 9.6 1 4 1 8 2-Applicable tubing 21.5 5 32 18 3 16 10.4 10 1 4 1 8 1 4 22.5 22.5 24 24.5 25 26 26.5 27 3 16 19.5 3.5 11.4 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 Connection thread 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 46 27 24 31 30 29.5 30 27 26.5 1 4 17.46 3 8 1 2 3 8 17.9 25.5 7 21 17

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Rotary Actuator/Vane Type

Size: 40 Size: 10, 15 Size: 20, 30 A port B port q e t e !2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Hydraulic

Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 M16 x 2 14 depth 8.6 40 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 M20 x 2.5 17.5 depth 10.8 50 71 60 11 28 24 24 8 58 11

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Air Slide Table

MXQA-A2087 47 4.4 17 6 10 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A) MXQA-CS25 MXQA-CT25 MXQA-A2587 54 5.5 19 6 11 44 13.5 19.3 M14 x 1.5 M8 x 16 MXQ8B MXQB-CS8 MXQB-CT8 MXQB-A887 35 2 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 6.8 MXQ12B MXQB-CS12 MXQB-CT12 MXQB-A1287 40 2.8 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 8.8 MXQ16B MXQB-CS16 MXQB-CT16 MXQB-A1687 47 3.6 17 6 10 36 11.2 16.2 M12 x 1 M6 x

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber VQZ200 Rubber Metal VQZ300 Rubber Metal Note: The base mounted and body ported manifolds for the VQZ 100/200/300 are stocked in inch porting as part of the P.O.P. 7 Q Q Q Base Mounted Q Q Series VQZ100200300 Q Q Q Q Q Q Q Specifications Q Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .page 10 Manifold . . . . . .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Series AP500

q w q AP1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

Vacuum Unit

1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1