NCQ8

Applicable bore size 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") Applicable bore size Part no.

Table of Contents

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

MB

6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6 9 9.5 6 17.5 12.5 10 9 9.5 6 CM2 Types without air cushion have different values for auto switch mounting positions.

ISO Cylinder

7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6 5 5 6 4.5 4.5 D-A7l/A80 D-A7lH/A80H D-A73C/A80C 8 8 9 9 7 7 7.5 7.5 D-A79W*2 13 10 10.5 11.5 11.5 Auto Switch Made to Order *1 D-A9l(V) and A79W types cannot be mounted on bore size

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

9 y t @0 u Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Red 3 None Orange 4 None Yellow 5 None Pink 6 None Blue 7 None Circular connector cable assembly Terminal no. Purple 8 White Gray 9 Black Lead wire color Terminal no.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

MNB

50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits Reed Switch Internal Circuits D-A53 D-A64 D-A59W Reed switch LED Choke coil Choke coil OUT(+) Brown [Red] OUT(-) Blue [Black] OUT(+) Brown [Red]

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

CLQ

For details, refer to page 9-15-1.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Fieldbus System

Nil Internal pilot Internal pilot, Built-in silencer External pilot External pilot, Built-in silencer Nil None 1 station S Note) R RS Note) 1 9 9 stations Note) When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids.

Table of Contents

9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

Aluminum High Vacuum Angle Valve

1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

DD 11-9-19 20 Series MSQ Construction #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MSQ R (With internal shock absorber) @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !