Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 150 8.5 4.5 1.2 0.6 0.5 300 4.6 2.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

MY1

) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Symbol -XB6 Heat Resistant Cylinder (10 to 150C) 3 Air cylinder which changed the seal material and grease, so that it could be used even at higher temperature up to 150 from 10C.

C85

Length of lead between switch body and protector should be less than 1 m. 3,4 CD-P switch 18 9 VOLT 15,5 3.4 38 46 6-11-46 46 Option Series C85 1 High Temperature XB6 2 Low Temperature XB7 C85 Mounting Bore size Stroke XB6 C85 Mounting Bore size Stroke XB7 N, E, F, Y 8, 10, 12, 16, 20, 25 mm N, E, F, Y 20, 25 mm Standard cylinder packing are replaced with special ones and other modifications

NCA1

9 Carbon steel @0 How to Order Seal Kit NCA1 W 150 PS Option Option -XB5 Oversized rod -XB6 High temperature -XB7 Low temperature -XC11 Dual operation/Single rod Bore W K Single rod Double rod Non-rotating 150 200 250 325 400 Available for 150, 200 and 250 bores only. Use single rod designation when ordering XC11 kit. Note: XC10 seal kit order 2 single rod kits.

CXS

Made to Order Made to order description Symbol Made to order description Symbol -XB6 -XB19 Heat-resistant cylinder High-speed cylinder -XB9 -XC18 Low-speed cylinder (10 to 50mm/s) NPT finish piping port -XB13 -XC22 Low-speed cylinder (5 to 50mm/s) Fluoro rubber seal -XB11 -X593 Long-stroke cylinder Without plate 1 -XB6 Heat-resistant cylinder Specifications CXS XB6 Bore size Stroke CXSM Slide

NCA1

Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How to Order Mounting Bore Stroke Suffix XB6 NCA1 Ex: NCA1B 150-0400-XB6 High temperature Auto switch capable not available Low Temperature Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) Fluid

NCA1

Anodized Rod cover Aluminum alloy 1 1 PS NCA 500 2 Electroless nickel plating Cushion valve Rolled steel 2 3 Phosphate coated Snap ring Spring steel 2 Special options Nil XB5 XB6 XB7 XB5B6 XB5B7 Bore 500 600 800 4 Cushion valve seal NBR 2 Standard Oversized rod High temperature Low temperature Oversized W/ high temperature Oversized W/ low temperature Anodized Head cover Aluminum alloy 1

42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600 450 300 750 1200

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

HRX-OM-W002

1600/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(

HRX-OM-X071

1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L/min)/ 0.34(at 23L/min) Pump capacity (50/60Hz) Pump capacity of option T1 7 MPa 0.35(at 16L/min) Pump capacity of option T2 7 MPa 0.40(at 24L/min) Rated fiow (50/60Hz) 8 L/min 15/ 23 Rated fiow of option T1 8 L/min 16 Circulating Rated fiow of option T2 8 L/min 24 fluid system Flow display range9 L/min 5 to 40 Electric conductivity

LEF-OM006xx

5 (V) DC2410% LEFB16A LEFB25A (mm) (300) 500 (600)(700) 800 (900)1000 (300) 500 (600)(700) 800 (900)1000(1200)(1500)(1800)(2000) (kg) 1.19 1.45 1.58 1.71 1.84 1.97 2.10 2.39 2.85 3.08 3.31 3.54 3.77 4.00 4.46 5.15 5.84 6.30 (kg) 0.12 0.19 1( ) 23() 452000Hz 1 () 4 5 6 7 8 10 8 W(kg) W(kg) 6 4 LE FB25 LEFB25 2 LE FB16 LEFB16 0 0 500 1000 1500 2000 V (mm/s) -13- 2.3.

SFOD-OMT0009CN

930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14

JXCx-OMT0001CN

930 750 610 500 500 410 340 250 200 170 [mm/s] () 24 16 8 [mm/s] () 39 26 13 -108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14