High Vacuum Angle Valve

.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26 25.5 121.5 138.5 89.5 69 458 A XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH. Power consumption specifications are shown in the below table.

Vacuum Unit

Model ZK2m07 ZK2m10 ZK2m12 ZK2m15 Noise level [dB (A)] ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 ZK2A (Silencer exhaust) 59 66 75 76 Actual values under SMCs measurement conditions (Not guaranteed values) Weight Single Unit Pressure Sensor/Pressure Switch for Vacuum Single unit model Weight [g] ZK2P00KmNmA (Vacuum pump system, Single unit, Without pressure sensor/switch) 97

Stability of suction position,

Width across flats 4(2) Width across flats 4(2) 32 78.6 32 61 52.5 61.5 67.5 87.5 53.61) 22 44.11) 18 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100 71.5 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-TF80BMl-AL12 208 203 243 ZP3E-TF100BMl-AL12 316 305 388 ZP3E-TF125BMl-AL12 24.3 M12 x 1.25 4 Width across flats 19 Seal washer 62 71 77 97

•

.;4 ; 1:16 ;K ;L y E D H H ZPTlOB 10 12 16 25 36.5 59.5 72.5 92.5 93 5.5 13.8 5.5 ZPT138 13 15 1&5 27.5 39 62 75 95 95.5 8.7 19 7.5 ZPTl68 16 18 20 29 40.5 63.5 76.5 92.5 97 9.9 21 8.5 12 Series ZPT /With Buffer , Connection With Barb Filtlng(Buffer) Pad Type Flat, Flat with rib, Deep Vacuum Entry Vertical Mounting Buffer Body 10 '13'16 10 .

MY1

2.7 Contact protection box internal circuits 4 Lead wire colors inside ( ) are those prior to conformity with IEC standards. 4.5 Operating range l 4.5 Operating range l 10 CD-P11 10 Most sensitive position OUT Brown [Red] Most sensitive position Choke coil Surge absorber Values inside ( ) are for D-A93 OUT Blue [Black] CD-P12 OUT(+) Brown [Red] Choke coil Zener diode OUT() Blue [Black] 97

NCA1

56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97

Refrigerated Air Dryer

IDF4E to 11E IDU3E to 6E IDF4E, 6E, 8E, 11E IDU3E, 4E, 6E 34 Circuit breaker Signal cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection Terminal block 32 97 15 Power cord outlet (17) GROMMET WITH MEMBRANE = Rubber grommet with integrated membrane for wire protection 40 67 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

CE

M A A CD CL CU CW CX CZ RR T Data 32 40 50 63 148 5.8 11.2 6.6 52.5 30 112.4 65 57 72.5 71 5.5 69.5 8 59 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97

MQQ

8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97

C95

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Effective thread length MB MB 4-J 16 GF 4-J V Q VA N K F GE MB1 BN A H S + Stroke ZZ + Stroke CA2 CS1 C76 C85 C95 Effective thread length (mm) Width across flats Bore size (mm) D F B A BP GL B2 BN GC GL1 C GA GB GD Ee11 CP95 32 10 12 13 54 19.5 22 G 1/8 7.5 46 97

ARM10/11

Do not use the products in this catalog as safety accessories stipulated in Art. 1, paragraph 2.1.3 and Art. 3, paragraph 1.4 of Pressure Equipment Directive (97/23/EC). The Pressure Equipment Directive defines a safety accessory as a device which is designed to prevent pressure equipment from exceeding the allowable limit values. 3. Confirm the regulating pressure range.

CQS

flange style142 g 241 g Weight/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 39 46 53 60 67 74 16 52 61 69 78 86 95 20 89 102 116 129 143 156 170 183 197 211 25 124 141 157 174 190 207 224 240 257 273 Weight/With Auto Switch (Built-in magnet) (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 47 54 62 69 76 83 16 63 71 80 88 97

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

MLGP

300 300 < st 350 80 100 46 56 54 62 7.5 25 31 10.6 17.5 14.5 25.5 32.5 74 89 52 64 174 210 75 90 198 180 210 140 166 28 50 128 124 200 200 300 300 52 72 156 188 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) 42 60 X YY YL Z st 25 st 50 50 < st 100 25 < st 100 100 < st 200 200 < st 300 300 < st 350 100 124 80 100 M14 x 2.0 24 28 28 35 92 97

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97

MY1

Electrical entry (Fetching direction) D-A90 D-Z80 Grommet (In-line) Grommet (In-line) Type Model Features Without indicator light Reed switch 8-11-101 97 Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-A9(V) Note) The operating range is a guide including hysteresis, but is not guaranteed. (Assuming approximately 30% dispersion.)

MTS

.: NTJ-015A 9.5 With end lock Width across flats 12 3.5 97 + Stroke 113 + Stroke 8-10-16 16 Precision Cylinder Series MTS Dimensions: 20 MTS20 Basic style 49.5 47 11 8.5 2-cushion needle Width across flats 8 4.5 4.5 Rod cross section 6 4.5 MX 2-M5 x 0.8 (Port size) MTS MY 5.5H7 +0.012 0 10h7 0 0.015 16 0.2 24 0.2 4-M5 x 0.8, effective length 8 14 15 4-4.5 through 2 x 4-7.5, counterbore depth

10-my1m-e

A: Black zinc chromated MY -16B-stroke, B: Nickel plated MY-16BW-stroke 97

Centering Unit

(Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97

Cylinder Positioner IP200 Series

SUP (SUP air) IN (SIG air) qInput chamber uDiaphragm A iDiaphragm B oSpool wFeedback spring EX OUT2 EX OUT1 eInput diaphragm yNozzle rConnecting rod tCylinder rod 152 Cylinder Positioner IP200 Series Dimensions 20 20 25 SIG OUT1 OUT2 20 25 2 x 6.6 OUT1 OUT2 IN side Rc1/4 38 60 50 SUP 31 35 135 + Stroke IP IP IW 97 1301 40 SUP AW 37 Rc1/4 M8 x 1.25 depth 15 IL1 66 62 + Stroke 80 IL2 Precautions