3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

Vacuum Unit

pages 11 and 12, and r on page 13.)

KK/KK13

22.9 44.7 R 1/8 50.1 46.4 KK4S-01MS 54.1 6 19 51 35.9 41.3 R 1/4 48.7 45 -02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

AC Servo Motor Driver (SSCNET Type)

Ready RD CN3-13 DO-1 PD07 0005 Electromagnetic brake interlock MBR CN3-13 DO-1 PD07 0005 0002 In-position (Positioning completed) INP CN3-9 DO-1 PD08 0004 In-position (Positioning completed) INP CN3-9 DO-1 PD08 0004 Trouble ALM CN3-15 DO-1 PD09 0003 Trouble ALM CN3-15 DO-1 PD09 0003 0 2 -31- (2) Symbol allocation using the setup software: Changing pins CN1-13 to Ready (RD).

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

S Couplers Series KK/KK13

19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Metal seal Rubber seal (1) Without (1) (1) With Function (1) With (w/o light) Symbol Specification DC (1.0W) AC Note 1) DIN style is applicable to VQ2000, 3000.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

IDX-OM-W053

5-1 . 5-1 6 6-1 . 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 .

EXxx-OMN0035CN

13 0 V() 24 V() 14 1 15 3 16 5 17 7 18 9 19 11 20 13 21 15 22 NC 23 NC 24 NC 25 0 V() 24 V() EX600-DYPE EX600-DYNE 1325 24 V 1~814~21 DC24 V DC24 V 1325 24 V 1~814~21 FE FE -37No.EX-OMN0035CN-A OFF ON SI (3)EX600-DYF EX600-DYPF EX600-DYNF 1 0 V() 24 V() 2 0 0 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 1 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 2 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6 3 3

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Contents CXSWM6-PS CXSWL6-PS CXSWM10-PS CXSWL10APS CXSWM15-PS CXSWL15APS CXSWM20-PS CXSWL20APS CXSWM25-PS CXSWL25APS CXSWM32-PS CXSWL32APS 6 10 15 Set of nos. above @0, @1, @2 20 25 32 8-29-27 28 Series CXSW Dimensions: 6, 10 CXSW6 ZZ SS 8 S 5.5 8 5.5 2-3.4 through 2-6.5 counterbore depth 3.3 2-M3 x 0.5 x 5l (Hexagon socket head set screw) 16 14 1 (13) 2.75 13 3 3 2-R 3.5 12 1 5.6 3.2 28

PC Wiring System Series PCW

5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

RQ

16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G

MK

1 4 Note 1) Above figure is for D-A73/A80.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1