Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45

Compact manifold regulator ARM5 Series

Material VY1 O-ring A Body (for centralized supply) 1 1 NBR 136019 PBT B Fitting assembly Bonnet 2 1 Refer to page 704. PBT VBA VBAT C Port plug Knob 3 1 PBT, HNBR Refer to page 705.

mb1

F N N C B Cylinder tube sectional view B-B Stroke range Bore size (mm) Width across flats Effective thread length C B G F E A V W H ZZ S P N MM J MB 32 40 50 63 80 100 9 6.5 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 84 84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31

70astamb1

37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up

Series IDG

Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 275 270 80 185 365 288 286 90 188 368 241 262 16 19 129 147 7 9 22 25 95 108 50 55 IDG60V, 60HV IDG75V, 75HV, 100V, 100HV 3/8, 1/2 1/2 31 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LV, 75LV, 100LV IDG60SV, 75SV, 100SV 91 Port size 3/8, 1/2 334 77 180 50 Purge air for dew point indicator 18 13 22 IN OUT 40 10

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Body Ported Manifold Preferred Option Program C 00T D VV3QZ 1 2 08 DIN rail mount Series D None DIN rail mounting (DIN rail standard length) 1 VQZ100 Manifold type 2 Body ported Kit C Connector Number of stations 02 2 stations 20 20 stations How To Order: VQZ100 Body Ported Valve For Manifolding VQZ 1 5 1 5 L N1 Port size {2(A) port} N1 N3 N7 M5 One-touch fitting for 1/8" One-touch fitting

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(For mounting) 32.5 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN 64.2) R P R 63.7 (DIN 65) B B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

15

Description 2 Ring 1 1 1 2 Ring 1 3 Hub (Motor side) 1 1 1 1 1 1 3 Hub (Motor side) 1 1 4 Hexagon socket thin head cap screw 1 1 1 1 1 1 4 Hexagon socket thin head cap screw 1 1 5 Hexagon socket head cap screw 4 4 4 5 Hexagon socket head cap screw 4 840 LEJS Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) LEF LEJ LEL LEM LEY LES A LEPY LEPS [mm] LER

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

: Large Size Bellows Type Vertical Vacuum Entry: Without Buffer ZPT HB-A14 (Male thread) ZPT HB-B (Female thread) 40 50 40 50 M14 x 1 8 1 Hexagon width across flats 19 (Rc, NPT, NPTF) 5 5 Hexagon width across flats 19 25 G 28 Width across flats 24 28 3 x M3 x 0.5 3 x M3 x 0.5 G 10 E 10 Width across flats 24 ZA F F E ZX Y Y 6 3 ZR 18 18 C C ZM A A B D B D ZMA Dimensions A Dimensions A ZQ B

ZR

Rc 1/8 IN port Rc 1/8 Out port 1 1 Bracket C Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20 20 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF

VZS

Response time (ms) (1) (2) (3) Weight (kg) Port size Rc Model Type of actuation VZ C [dm3/(sbar)] b Cv 2 position VZS2150 17 or less 0.14 Single 1200 1 8 0.33 0.19 1.4 0.28 0.12 1.2 VF VZS2250 13 or less 0.19 Double 1200 1 8 0.33 0.19 1.4 0.28 0.12 1.2 VFR Closed center VZS2350 22 or less 0.2 600 0.27 0.17 1.1 0.21 0.23 0.90 1 8 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Fieldbus System

3-port valve (A) 2(B) (A)4 A Note) 1(P) 5(R1) 3(R2) 4-position dual 3-port valve (B) 2(B) (A)4 B Note) 1(P) 5(R1) 3(R2) 4-position dual 3-port valve (C) 2(B) (A)4 C Note) 1(P) 5(R1) 3(R2) Note) Only rubber seal type Refer to the SMC website or the VQC1000/2000 series catalog (CAT.NAS11-101) for details on solenoid valve specifications, Common Precautions and Specific Product Precautions.

Rotary Table/

1 @1 !2 q @0 u !

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

[74] 51.6 35 27 8 24 (Pitch) P=19 21 1/8 (A port) 49

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

VZ3000

P), 3/5(R) port Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 VZ One-touch fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3