Stations: 10 Stations, Port Size: L4 (ø4 One-touch Fitting, Top Ported Elbow), S Kit: SFA (PROFINET - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: BD (B + D), DIN Rail Length: 11 Stations (for 11 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: L4 (Elbow Top Ported ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

ZSE5/ISE5

~ Fluid Fluid that will not corrode SUS304 and SUS630 PI P2 Wti:ldow cOfTl)aratoc rnode (standard) nl n2 Wifldow corTlJ3rator mode (reversed) Temp. characteristics 3%F.S.max.

Clean Gas Filter

Applications and Circuit Examples Cartridge type Cartridge type Disposable type Disposable type Refrigerated air dryer Heatless dryer Super mist separator After-cooler Air source Gas filtration and gas flow Odor removal filter Air tank Main line filter Mist separator Micro mist separator SFB3 SFC1 Micro mist separator with prefilter Membrane air dryer N2 gas SFB3 SFC1 SFA, SFB1 Clean blow

Stainless Steel Regulator Series NSR

Fluoro rubber Cle6n ieguletd Fluoro rubber & Body size Fluorc resin 'l 10-32 UNF Construclion o-Non relieving (standard) 'l -Relieving {only applicable to Airor N2 gas) NoteiConsull factory ior applications ol othr tluids.

DIGITAL FLOW SWITCH. DIGITAL FLOW SWITCH. 0.19400 lb. F27.

DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 117 lb

42

T kit: 0.32(n2) + 1.8 F, T kit 18 stations Side 1/2 Option SV L F kitD-sub connector L T kitTerminal block box L L kitLead wire L S kitSerial transmission VQ4l00 VQ4l01 L kit 16 stations VQ4000 VV5Q41-lll Direct exhaust with silencer box SYJ S kit 18 stations Not including valve weight.

XL

Port S (10) remains pressurized and valve S (18) remains open.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

LVQ

T) View Z (mm) Dimensions A B C D M N S T U V Model LVQ20-S-3 LVQ30-S-3 LVQ40-S-3 LVQ50-S-3 LVQ60-S-3 25.5 46 31.5 58 7 15 83 35.3 10.6 7 23.5 47 29.5 59 7 15 113.5 36.9 16.5 10 23.5 47 29.5 59 7 20 119 37.9 22 35 70 41 82 7 20 171.5 64 25 17 35 70 41 82 7 20 182.5 66 32 With indicator, High back pressure spec. with indicator N.C. valve Dimensions (mm) S Model LVQ20-S-4 LVQ30-S-4 LVQ40-

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s '" ?

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

PF2A/PF2W

or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

PF3A7xxH-L.eng

Safety Instructions S S S Warning F0 function setting F1 function setting F99 function setting S Default setting Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result.

PF3A7xxH_eng

S S S S F0 function setting F1 function setting F99 function setting [Measurement mode] Measurement mode is the condition where the flow is detected and displayed, and the switch function is operating. This is the basic mode; other modes should be selected for set-point changes and other function settings. Do not use the product for flammable fluid. Fire or explosion can result.

PF3A7xxH.eng

S S S S [Measurement mode] Measurement mode is the condition where the flow is detected and displayed, and the switch function is operating. This is the basic mode; other modes should be selected for set-point changes and other function settings. F0 function setting F1 function setting F99 function setting Do not use the product for flammable fluid. Fire or explosion can result.

Rated Flow Range: 0.01 to 1 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon Dioxide