Electric Actuator with Integrated Guide

Allowable Moment (Nm) Allowable dynamic moment LTF6 Model Mounting orientation Load movement direction 200 L1 (mm) L3 (mm) Pitching Rolling Vertical Vertical 100 m a a=1000 a=2000 a=3000 L1 Mep 0 6 4 2 Transfer load m (kg) 200 100 a=1000 a=2000 a=3000 a L3 Mey 6 4 2 0 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment L : Overhang

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R: External pilot style Electrical entry 24V, 12V, 6V, 5V, 3V DC/100V, 110V, 200V, 220V AC Grommet L plug connector M plug connector G: 300mm lead wire L: 300mm lead wire M: 300mm lead wire MN: Without lead wire SYJ3l2R is only for manifold use.

Vacuum System Peripherals:

length 0.6 m (Applicable to only DC) Air operated L ZCU Y LN Plug connector type LO AMJ M MN Misc.

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H:M8X125 oK "l G Model M ; 8 C 0 E F G 140 34 6 I !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

Modular F.R.L. Units

Example) IS10M-30-6LP Symbol Description Nq Body size 20 30 40 50 60 a Set pressure range Nil 0.1 to 0.4 MPa 61 0.1 to 0.6 MPa + Semi-standard Nil 0.5 m L 3 m Z 5 m + b Lead wire length Nw 23 15 (13) c Pressure unit of the scale plate Nil MPa P2 MPa/psi dual scale (23) (5000) (3000) (500) 1 Set pressure range of 6P (L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). 2 This product is for overseas use

0.4

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly Pins 10P 16P 20P Cable length (L) Pins Cable length (L) 1.5 m 1.5 m AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 15P 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m 3 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 AXT100-DS15-2 Connector width (W) 5 m 17.2 24.8 30 AXT100-DS15-3 For other commercial connectors, use a type

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Secondary Batteries

4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 90 Material restriction Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Thread type Nil N F Rc NPT G Lead wire M12 3 m lead wire with connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Solid State Auto Switches

Pin arrangement 4 3 3 Cable length Connector model S M L A B D 0.5 m 1.0 m 3.0 m M8-3 pin M8-4 pin M12-4 pin Note) L is available for the D-P4DW type only. Note) Type D is available for the D-P4DW type only.

LEC-OM02704CN

i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3()

Thermo-chiller/Rack Mount Type

(at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19 Installed Tank capacity

2/3 Port Valve

: Fluid temperature (C) S : Effective area (mm2) Cv : Cv factor (/) 4.1-50 VX31/32/33 Dimensions (Orifice size 1.5mm, 2.2mm, 3mm, 4mm) Energized Open/VX31 0, Energized Closed/VX31 2, Common/VX31 4, 32 4, 33 4 1 2 3 1 2 3 1 2 3 2 2 3 2 2 3 Grommet: G Conduit: C DIN connector: D Conduit terminal: T VX VNl VQ B Measurement for connection H J K L M L M L M L M N N Grommet Conduit DIN connector

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

ZR

Symbol 25 (L) Lead wire length Output specifications NPN output Analog output PNP output NPN output Analog output PNP output Applicable switch Lead wire length 0.6 (3.0) m 26 (L) Lead wire length 0.6 (3.0) m 65 (L) Lead wire length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 Ex.) ZR1--CN . 1 pc.

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M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Compact Guide Cylinder

L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 5 5 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 18 MGPK Series L L m m Plate Material Aluminum Alloy