212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Thermo-chiller

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

CRQ2

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-77 (YG)

CYV

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing January, 2001 D-SMC.L.A.

MGF

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 1996 D-036 P-98 (M) 2nd printing May, 2001 D-SMC.L.A. P-80 (JT) All specifications in this catalog are subject to change without notice. Printed in Japan.

MHZ2/MHZJ2

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1998 D-SMC.L.A. P-77.5 (JT)

FQ1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

ZSE30/ISE30

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing September, 2001 D-SMC.L.A. P-80 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

F/ISE

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Title not found

Atmospheric release port Air tube Recommended tubing (SMC) TU0425 (polyurethane) 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com Printed in Japan. Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing September, 1999 D-SMC.L.A. P-80 (JT)

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)