Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

1 Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 How to Order Integration of a quick exhaust valve and an exhaust restrictor permits high-speed cylinder operation. 3 1 0 F 01 06 ASV S K Speed exhaust controller Option Nil None The effective area is two times larger.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Precision Clean Regulator

purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

REA/REB

BB Attached from top with cap bolt Bolt size: MD LA A 4Counter bore depth CC XA FG 4-BA LF Body Switch rail FG X A FH XA High Precision Guide Type REAH HB Note 1) FF Note 1) HL D' FE Note 1) Floating block Section D-D' Max.

ZP

Features and Precautions for Vacuum Adsorption 1 Vacuum adsorption system as a method to hold a workpiece has the following features.

REA/REB

REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY Auto switch model Bore size (mm) D-A9 A dimension

REA/REB

90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting Position (Detection at stroke end) RE A B B A

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a:1>20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

High Precision Digital Pressure Switch, Series ZSE40/ISE40

High Precision Digital Pressure Switch How to Order 0.100 to 1.000MPa For positive pressure Set pressure range Nil ISE40 01 22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range Nil F For vacuum pressure For compound pressure Nil None Bracket A (ZS-24-A) 10.0 to 101.3kPa 100.0 to 100.0kPa A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8

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High Precision Digital Pressure Switch How to Order Set pressure range 0.100 to 1.000MPa For positive pressure Nil ISE40 01 22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range For vacuum pressure For compound pressure None Bracket A (ZS-24-A) Nil 10.0 to 101.3kPa 100.0 to 100.0kPa Nil F A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8

Shock Absorbers and Rate Controls

lrlA |.25N/A r{/A.1 3 .35 t ( l{/A 13.9 or.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

-fl Seies

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction