8)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

LEC-OM02904

PB35 0.00 PB36 0.00 PB37 100 PB38 0.0 PB39 0.0 PB40 0.0 PB41 1125 PB42 1125 PB43 0004h PB44 0.0 PB45 CNHF 2 2 0h (1) 0 22 2(2) [Hz] [Hz] 0 1 2250 5F 4.5 2 (2) 0 -40.0dB F -0.6dB 1. C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

Rotary Actuator/Vane Type

2 CRQ2 No.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

PSxx-OML0002CN

2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

VQZ100/200/300

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

lPSMt

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

lPSMt

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins