ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

LEC-OM02904

MO1 1 1 LG 2 14 MO2 2 LE-CSS(6)SSCNET () SD 6 SSCNET CN1A SW1 2m 2m SW1 (8) SW2 CN1B 2 1 (1) MR-J3-B LECSS (2) (7) 2 SW1 CN1A (8) SW2 CN1B 2 1 LE-CSSMR-J3-B LECSS (3) (7) 3 (6) SSCNET () 6 SSCNET SW1 CN1A SW2 (8) CN1B 2 1 MR-J3-B LECSS (n) (7) n SW1 CN1A 9 (9) SW2 (8) CN1B 2 1 3 7 3 1.

Booster Regulator Series VBA1110 to 4200 1

Handle operated type Air operated type VBA1110 VBA200 VBA400 Model AV Max. 2 Pressure increase ratio VBA2200-03 VBA4200-04 VBA1110-02 VBA1-02 VBA2100-03 VBA4100-04 Note) 400 60 1000 1900 1000 1900 Max. flow (l/min (ANR)) VBA1 2 to 4 AU 1/2 (IN/OUT) 1/4 (IN/OUT) Connection port size Rc 3/8 (IN/OUT) 3/8 (IN/OUT) 1/2 (IN/OUT) Fluid Compressed air 1/4 Exhaust port size Rc 3/8 1/2 1/2 3/8 VBA1110

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

ITV

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E SMC REGULATOR 2 OUT P G Connection thread type MPa IR N F PT NPT PF SUP 2 VEX G Manifold base (3 stations) 1 2 3 AMR IITV20-02-3 ITV2030-311S-X26 P398020-13 ITV2050-212S-X26 1 set (3 station manifold base part no.) 1 set (Electro-pneumatic regulator part no.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

PFA/PFW

GPM gal (US) Hysteresis mode OFF n-1 n-2 GPM = gal (US) /min Large flow rate "n" H (fixed hysteresis) = 3 digits H H ON Window comparator mode NO OFF n-1 n-2 Large flow rate 19 Series PFA/PFW Digital Flow Switch for Air/Water Flow Rate Setting Flow rate setting mode (manual) 1. Setting Value Input Mode (Manual) 2. Setting in the Manual Mode 3.

energy saving effect

NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper

VQ7-6/7-8

1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5 171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Clean Gas Filter

IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF

Thermo-chiller

/4, Symbol N: NPT1/4) Automatic uid ll system (Standard) Pump capacity Supply side pressure range 29 to 73 psi (0.2 to 0.5 MPa) Supply side uid temperature 41 to 95 F (5 to 35C) Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM,

HRS100/150

NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

=17 18 35 (DIN 36.2) 35 (DIN 36.2) 21.5 21.5 P R P R P R P R 57.1 [59.3] 57.1 [59.3] 2-5.5 (For mounting) 2-5.5 (For mounting) Manual override Manual override Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) L2 L2 4.5 4.5 L1 L1 (Station 1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1

IR1000/2000/3000

IRM 10 3 G Copper-free Specifications 2 Set pressure and quantity External and internal copper parts are changed to stainless steel or aluminum. 0.2MPa setting 1 to n pcs. 0.4MPa setting 1 to n pcs. 0.8MPa setting 1 to n pcs. 0 1 2 Standard part number 20 Note) Contact SMC if equipped with pressure gauge.

P

Symbol Thread dia. 1 A8 Adaptor connection thread Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] S ZP 06 B5 R [wR type adaptor] Adapter connection thread Symbol S Pad dia. 02 to 16 Pad dia.

HRX-OM-W002

R 1 1 [ ] R [ ] 14AWG BK 14AWG BK E CT 1 14AWG G/Y G1 [ ] CP (CN4) N N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 BR 3 3 (CN2) WH BK BL 4 4 12 12 11 11 2 2 1/2 BR (CN1) 1 1 (CN7) 3 6 3 3 18AWG BK 1 18AWG BK 4 1 1 18AWG BK 18AWG BK 5 (CN5) 2 18AWG G/Y G5 [ ] 18AWG G/Y 3 2 1 Fig. 8-9 Electrical schematic diagram (Water-cooled type) HRR Series 8.5 Electrical schematic