SYA3000/5000/7000

Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 0.8 (Pilot port) 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Manual override (Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch

42

Stations 01 1 station Kit type The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.) Note 1) When multiple symbols are specified, indicate them alphabetically. Example) -CDK Note 2) Combination of [CU D ] and [SU D ] is not possible. Note 3) Specify the wiring specifications on the manifold specification sheet.

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Digital Pressure Switch ( compatible)

Function selection mode 28 Default setting 28 F 0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving

BP1000

0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

Guide Cylinder Series MGG

29.5 30.5 30 30 34 24.5 27.5 26 33.5 23 (32) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 27 (36) 40 40 35 37.5 38 36.5 34.5 35.5 34.5 35 39 29.5 32 31 38 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 32 (36) 50 50 40.5 43 43.5 43.5 41.5 42.5 40 42 46 36.5 39.5 38 43.5 28 (40) 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

One-touch Fittings Series KQ2

12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 11.11 14.29 17.46 12.7 14.29 17.46 26 28 30 28 30 1 4 13.2 10 20.5 4.6 17 5 16 23.5 15.2 12 6 18.5 NPT 31.5 6 31.5 32.5 34 17.9 17 17.46 25.5 3 8 21 7 36.5 36.5 9 17.46 1 2 21.7 17 28 22 38.5 40 9.6 22.23 Reference dimensions after NPT thread installation.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(For connection fitting weight, refer to page 8-15-28.) For the (Fn) of data A, refer to the allowable driving force table. Determination of connection fitting weight (WB) WB > WBMAX Review of connection fitting WB WBmax (Refer to data A on page 8-15-28.)

4-channel Flow Monitor (Remote type monitor unit)

Power and output cable (ZS-26-A) Sensor connector ZS-28-C ZS-28-CA-42No.PF-OMH0003-F Revision history A: Full scale revision due to the change of the format and addition of items. B: Content is changed due to the change of the format. C: Contents revised in several places. D: Contents are added. E: Contents revised in several places. [July 2018] F: Contents revised in several places.

Vacuum Ejector Series ZM

Temperature characteristics Operating voltage 4.5 to 28 VDC 100 VAC/VDC Open collector 28 V, Max. 40 mA PNP open collector 80 mA NPN open collector 30 V, Max. 80 mA ON-OFF output 2 points 1 point 1 point Lights up when ON Lights up when ON Lights up when ON (Red) 1 point Setting points Operation indicator light Setting trimmer Current consumption Lights up when ON 18 rotations Lights ON (

ZQ-OM01301

Specifications 28 10. Pneumatic Circuit 31 11. Exhaust Characteristics, Flow Characteristics, 33 Vacuum Pump Flow Characteristics, and Vacuum Release Flow Rate Characteristics 12. Handling Precautions 37 13. Trouble shooting 38 1 - Doc. No.

IZx-OMV0005

Note (mm) Models A 01 02 01 02 IZN10E06 3.5 IZN10E07 7 28 Doc. no.IZ-OMV0005 16 17 One-touch fitting (Elbow)IZN10E(mm) Models B C D IZN10E-16 22 16 11.5 IZN10E-17 24.5 18.5 12 Female threads for pipingIZN10E-11 Width across flats: 12 29 Doc. no.IZ-OMV0005 L-bracketIZN10-B1 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

ZR

(Individual spacer) Fill the number With reference from valve side, the third station from right side 13-3-28 28 Series ZR Large Size Vacuum Module: Ejector System Manifold/System Circuit Example When not using individual air pressure supply When using indivisual air pressure supply Ejector 1 Ejector 2 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

28 Series MGG Guide Cylinder With End Lock Construction 20 to 100/MGG Manual release (Lock type) !

9.8

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum