C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 3-2-9 Series VK3000 Base mounted (Side ported) Type 42 Manifold Grommet: G DIN terminal: D VV5K3-42Station -01 ~ = ~ = Solenoid

LEC-OM02904

ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

SYA3000/5000/7000

Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 0.8 (Pilot port) 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Manual override (Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 x 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center

5 Port Air Operated Valve SYA3000/5000/7000 Series

/SYA5000 Series: Body Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 0.8 (Pilot port) SYA SYA SYJA VZA 2 x 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" VFA 2 x 3.2 (For mounting) VFRA VPA4 SYJA VZA VTA VGA 1/8 (P , EA, EB port) 1.8 (Ventilation hole) Manual override (Non-locking) VPA

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

Title not found

d" "o* 10ffoll-s t t l 16 E D Il-@ t t l 16 E D Il-@ Flat ribbon cable conneclor: 26 Dins Flal ribbon cable connecior:20 pins Flal ribbon cable connecror: 10 oins . Tie-rod base SS5V .

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

PSE540/560

ZS-27-01) M3 x 8L 2. Connector pin numbers for power supply/output cable Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling. Regulating Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range.

VK300

type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3 05 01 42 VZ Thread type VS Solenoid direction Port size Opposite

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

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Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.