MTS

. 600 800 Maximum speed (mm/s) 300 500 30 (13) Stroke (mm) 10 (8) 100 50 150 200 50 100 150 200 20 (9) 30 (10) 10 (11) 20 (12) 8 Selection graph (15) (14) (16) (17) (18) (19) (20) (21) 12 to 40 L: Overhang The distance between the cylinders central axis and the load center of gravity Caution In the case of horizontal mounting, when the load center of gravity is

Precision Regulator

IR IR IRV VEX SRH Relief flow rate characteristics SRP Possible to relieve (exhaust) air ranged 50 to 4000 L/min (ANR) SRF Back pressure: 0.7 MPa Back pressure: 0.7 MPa ITV 0.7 IR2010 IR201 0.7 IR3010 IC 0.6 0.6 IR401 Set pressure (MPa) Set pressure (MPa) 0.5 0.5 ITVH 0.4 0.4 ITVX 0.3 0.3 PVQ 0.2 0.2 0.1 0.1 VY1 600 500 400 300 200 100 0 5000 4000 3000 2000 1000 0 VBA VBAT Relief flow (L/

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

light 8 3.2 DC (+) Brown 2.6 2 4.6 4 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Wireless System

Enclosure IP67 equivalent (with manifold assembled) Ambient temperature (Operating temperature) 10 to +50C Ambient temperature (Storage temperature) 20 to +60C Ambient humidity 35 to 85% RH (No condensation) General Withstand voltage 500 VAC for 1 minute between external terminals and metallic parts Insulation resistance 10 M or more (500 VDC between external terminals and metallic parts)

Magnetic Separator FHM Series

Contaminant concentration of used fluid: 500 ppm (initial concentration, percentage by volume) 4. Number of separators: 2 pcs. (applicable fluid storage volume of 100 L/unit) Based on the elimination ratio data for the FHM-100 and the point where the 500 ppm line and flow-back count 30 line intersect (one hour after starting operation), the result is 75%.

HRX-OM-W060

By default: 500 hour Usage time Displays the usage time of a dustproof filter. 6 Dustproof 1 to 9hour The Maintenance reminder is issued if the usage time has reached the hours specified by the user.

HRX-OM-X071

500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature

smcmaintenancepartslist

How to Order Standard Elements 500 EM A 074 Element seal material/Operating temperature range Micromesh element symbol Symbol Element seal material Non-asbestos Fluororesin NBR FKM Operating temperature range(C) 0 to 150 0 to 120 0 to 80 0 to 120 Symbol Element composition symbol A Note) Element composition symbol Stainless steel 304 Stainless steel 316 T Note) 100 500 N V Note) Not possible

MU

Operating the cylinder by connecting the piping directly to the cylinder can cause the piston speed to exceed the maximum operating speed of 500 mm/s. Therefore, to operate the cylinder, make sure to use an SMC speed controller and adjust the piston speed to 500 mm/s or less.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

CXS

CXSW6 1 0.5 0.4 0.3 0.2 0.1 0.05 Bore size (mm) 6 to 32 100 200 300 500 1000 0 50 CXSWM (Slide bearing) Cylinder speed Vp (mm/s) 0.1 CXSWL (Ball bushing bearing) 34 Dual-Double-Rod Cylinder Series CXSW Made to Order Auto Switches Precautions Compact Type CXSJ Standard Type CXS With Air Cushion CXS With End Lock CXS Construction CXSWM Slide bearing CXSWM6 CXSWL Ball bushing bearing CXSWL6

ASR

rotations Meter-in Type (Inlet Pressure: 0.5 MPa) ASQ530F ASQ430F ASQ630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 400 Effective area mm2 Effective area mm2 Effective area mm2 6 12 1000 15 300 8 4 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle rotations Pressure Characteristics (ASR) ASR430F,

A

500 Model A B C Pipe Size Flow Rate ln/min 12500 16500 NAL800 100 283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy of Steven Engineering, Inc. !

ML1

, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

MQQ

Selection Series MQM Caution Operating Speed Allowable Kinetic Energy Lateral load resisting type: MQML Load weight and maximum speed Bore size (mm) Allowable kinetic energy (J) 1000 Example) Driving a load of 15(N) using MQM16 with a maximum speed of 460(mm/sec) 500 6 10 16 20 25 0.015 0.059 0.161 100 0.386 0.597 50 Load weight W(N) (15) 10 5 25 20 1 16 0.5 10 6 0.3 50 100 (460) 500 3000

Table of Contents

600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components For details regarding different conditions, make determinations after using the SMC Model Selection Program Pneumatic Cylinder Drive Systems.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

VDC Mega) between external terminal and case Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs., whichever is smaller.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.