VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

HRX-OM-Y098

S/ cm 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper

SYJ3000/5000/7000

/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz 50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

HRL

0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate*6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range S/cm 0.5 to 45*9 0.5 to 45 0.5 to 45*9 0.5 to 45 0.5 to 45*9 0.5 to 45 Circulating fluid system Pump capacity Particle filter nominal filtration rating (Accessory) m 5 5 5 5 5 5 Circulating

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-10-FG-D-M0 EVS7-10-F G-D-M0 H J I 232 232 124 124 45 (12 port) 45 (14 port) 45 (12 port) 45 (14 port) 22 (4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5

ZP

. 50 50 B Bellows ZL Flat (U) Flat with ribs (C) ZY ZP02U to 08U ZP10C to 50C ZQ ZF ZP ZCU AMJ Misc.

V

or less 47 or less Center Rubber Seal VQ43(0, 5)0 36.0 (2.0) 50 or less 52 or less Exhaust Metal Seal VQ44(0, 5)0 36.0 (2.0) 45 or less 47 or less Center Rubber Seal VQ44(0, 5)0 39.6 (2.2) 50 or less 52 or less Pressure Metal Seal VQ45(0, 5)0 36.0 (2.0) 45 or less 47 or less Center Rubber Seal VQ45(0, 5)0 39.6 (2.2) 50 or less 52 or less Note 1) VAlue for Valve on Subplate and Cylinder Port

MQQ

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Air Fittings & Tubing

Hexagon socket head male connector 1 4 KQS 3 8 1 2 1 8 45 Male elbow 1 4 KQK 3 8 1 2 1 8 Universal male elbow 1 4 KQV 3 8 1 2 2.5-6

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

ZP

64.5 77 50 151.5 74.5 N S U F GN GS 20 25 23 J K ZP T U 10 58 35 23 20 96 45 51 30 106 55 40 142 65 77 50 152 75 32 23.5 10 B5 B01 N01 T01 06 08 N6 U6 94.5 44.5 20 104.5 54.5 30 114.5 64.5 50 159.5 84.5 75 50 40 32 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 95.5 45.5 33 50 20 105.5 55.5 30 115.5 65.5 50 160.5 85.5 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction

MQQ

FD FT FV FX 10 to 40 79.5 61.5 4.5 5.5 30 45 10 FV 10 to 60 90.5 70.5 6.6 8 39 48 16 10 to 60 99 79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134

Thermo-chiller/Rack Mount Type

/60 Hz)3 [W] 5000/5900 Heating capacity (50/60 Hz)3 [W] 1000/1200 Temperature stability4 [C] 0.1 Pump capacity (50/60 Hz)5 [MPa] 0.34 (at 15 L/min)/0.34 (at 23 L/min) Rated flow (50/60 Hz)6 [L/min] 15/23 Flow display range20 [L/min] 5 to 40 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle