MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

RHC

54.5 M14 x 1.5 40 50 to 100 EA EA GA NE NF 4-FD Rc P GA Rc P WH H1 MM I FW ND E D FY E Effective thread C B FX JC JC FB FT K A H S + Stroke ZZ + Stroke FA FZ FX FW 96 FT 78 FD 15 FB 11 FA 10 EA 23 D 62 C 20 B 53 A E Bore size (mm) 50 Stroke range (mm) Up to 1200 Eff. thread length 32 50 0.042 70 35 0 63 Up to 1200 32 55 0.074 104 84 15 11 10 23 58 20 60 80 35 0 80 Up to 1400 37 65 0.074 130

RSQ

RSG-R Bore size: 40, 50 Workpiece transfer direction (51 + Stroke) M45 x 1.5 Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A 4-9 through 63 + Stroke 67 + Stroke 130 + 2 stroke B Built-in One-touch fittings QB QA Tubing O.D.

Table of Contents

Construction. 112 112 114 115 119 120 120 122 125 127 127 128 128 130 130 133 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 135 135 136 138 144 139 145 145 145 146 146 147 147 149 151 156 157 158 158 159 159 160 162 164 165 166 169 182 182 183 183 186 187 191 199

RLQ

155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 CL C Spring washer D CL1 Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

Suction Filter with Case FH99 Series

78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102 M10

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

, 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

6 VB4-6 VB6-6 VB8-6 4 6 8 74 102 130 96.5 124.5 152.5 62 90 118 82.5 110.5 152.5 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7 250 0.94 340 1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130

HRX-OM-W060

Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130

HRX-OM-Y098

flow rate range 0.3 30 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow[L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39

HRX-OM-W032

PID control Ambient temperature1 2 8 oC -5 to 45 Circulating fluid1 2 Clean water, 15% ethylene glycol aqueous solution, Deionized water Operating temperature range1 oC 5 to 35 Cooling capacity3 50/60Hz kW 17.5 / 20.5 Heating capacity4 50/60Hz kW 3.3 / 5.3 Temperature stability5 oC 1 Rated flow rate (Outlet) L/min 45 ( 0.31 / 0.45 MPa) Pump capacity 50/60Hz Maximum flow rate L/min 110 / 130

Clean Gas Filter

B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection 0.5 MPa SFA103-02 SFA203-02 SFA303-02 76 96 120 117 122 130

Magnetically Coupled Rodless Cylinder

17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40 50 60 X 18 22 28 35 40 Y 54.5 64 72 79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

S070

) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6 13 108.4 112 14 115.6 119.2 15 122.8 126.4 16 130