Fieldbus System Absolute accuracy (77F) Current consumption 100 mA or less Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.6 lbs (300 g) Note 1) M12 (4-pin) connector can be connected. Note 2) When input signal exceeds 22 mA, the protection function activates and the input signal is interrupted.
0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm
0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position
, 300 20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
, 300 20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
300 350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200
150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0 0
PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13
300 350 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 Set pressure (MPa) Set pressure (MPa) 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8
Nominal pressure 3.5 MPa CHM Proof pressure 5.0 MPa CHS Maximum allowable pressure 3.5 MPa Minimum operating pressure 0.25 MPa CH2 Without auto switch: 10 to 80C Ambient and fluid temperature With auto switch: 10 to 60C CHA CHA Piston speed 8 to 300 mm/s Cushion Cushion seal Related Products +0.8 0 +1.0 0 +1.25 0 +1.4 0 +1.8 0 to 100st , 100 to 250st , 250 to 630st Stroke length tolerance
NCQ8WB200-PS NCQ8WB200-PS 200 (2") NCQ8WB250-PS NCQ8WB250-PS 250 (2 1/2") NCQ8WB300-PS NCQ8WB300-PS 300 (3") NCQ8WB400-PS NCQ8WB400-PS 400 (4") SeriesNCQ8 Air Cylinder: Standard Type Single Acting Maintenance Parts Construction Single Acting, Spring Return 056 to 250 9 Seal Kit Parts List No. 9 Description Piston Seal Material NBR *BLUE links will lead to purchase pages.
Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.
Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units
mm/s 50 to 250 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) Stroke length tolerance +1.5 0 mm 1 Max. speed with no load 2 Depending on the system configuration selected, the specified speed may not be satisfied.
View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate
Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 300 Max. manufacturable stroke 25, 32, 40, 50 Data 300 Strokes other than the above are produced upon receipt of order.
Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.