LX

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy ( ) 50 to 100mm stroke Non-rotating accuracy ( ) 0.09 1 0.1 10 50 100 Eccentric

Air Slide Table

10 18 12 27 49 40 400 113 10 10 19 16 35 62 50 670 201 16 16 33 20 43 72 60 1,100 314 21 21 49 25 52 88 70 1,900 491 41 41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

1

13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Smooth Cylinder/Low Speed Cylinder

YA 03 YA-03 32,40 6.5 10 18 6.8 16 6 42 YA-05 50,63 6.5 12 20 9 20 8 50 Applicable air cylinder bore YA-08 80 8.5 16 26 11 25 10 62 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 YA-10 100 10.5 18 31 14 30 12 76 Mounting bracket YA YB YU Type A mounting bracket Bore size (mm) U V W Weight (g) Part no.

5

Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH Z* DDH10 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14

SX

(Mounting hole for manifold) 2-4.2 Manual override (Mounting hole for manifold) 42 18.4 (A, B port) 2-One-touch fittings (Press and turn for the locking type) Applicable tubing O.D.: 8 10 Applicable tubing O.D.: 8 10 (Light/Surge voltage suppressor) (5.5) (5.5) 48.6 (Light/Surge voltage suppressor) Polarity indication 48.6 33.3 31.5 33.3 31.5 6.7 300 10 B +A COM (Lead wire length) 107.5 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

ZP

Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

KJ

fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 18.5 KQ2R08-12 42 4.6 12 20 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

25

(mm) Installation distance Detection range 10 45 25 100 Detection range 50 180 423 RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-SS5YJ5-40 Type 10-SS5YJ5-41 Type 10-SS5YJ5-42 Type 10-SS5YJ5-43 Type 10-SS5YJ5-41P Type 10-SS5YJ5-42P Type 10-SS5YJ5-43P Gasket Applicable manifold base Type 10-SS5YJ5-20 Type 10-SS5YJ5-20P Applicable manifold base Type 10-SS5YJ5-20-Q Type 10-SS5YJ5-20P-Q Applicable manifold base Type 10-SS5YJ5-40-Q Type 10-SS5YJ5-41-Q Type 10-SS5YJ5-42-Q Type 10-SS5YJ5-43-Q Type 10-SS5YJ5

Table of Contents

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

Air Fittings & Tubing

Effective area (mm2) Weight (g) L M A D Nylon Urethane 2 1.8 3.2 4 6 KQ2R23-04 KQ2R04-06 9.6 33.5 34.5 3.4 2.9 15.5 18.5 17.5 10.4 4 KQ2R04-08 36.5 5.6 4 2.0 8 18 16 KQ2R04-10 12.8 39.5 3.3 10 18.5 2.5 KQ2R06-04 4 12.8 37 4 4 21 6 KQ2R06-08 37 2.5 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 10.4 3 10 18.5 KQ2R06-12 42 15.2 4.7 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12

CL

90 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 39 43 54.5 65.5 28 33 40 49 35.8 39.8 49.4 58.4 42 42 48 56 10 10 10 10 3.2 3.2 4.5 4.5 16 20 22 30 5.5 5.5 6.6 6.6 28 28 28 30 25 30 35 40 MGG MGC MGF Clevis/CLG1DN CY1 Clevis Bore (mm) MY1 BZ TV TZ CZ TW L RR TX TY TE TF TH TT CDH10 20 25 32 40 8+ 0.058 0 10 + 0.058 0 12 + 0.070 0 + 0.070 0 14 29 33 40 49 42 42 48 56 44 35.8