CM2

41 8 13 12 15 20 M8 x 1.25 15.5 8 12 18 8 28 5 24 M20 x 1.5 13 5 0 0.033 20 25 45 8 13 12 15 22 M10 x 1.25 19.5 8 12 22 10 5.5 30 M26 x 1.5 17 6 33.5 0 0.033 26 32 45 8 13 20 15 27 M10 x 1.25 19.5 10 15 22 12 5.5 M26 x 1.5 17 6 37.5 34.5 0 0.033 26 40 50 11 16 20 33 M14 x 1.5 21 10 15 24 14 7 M32 x 2 22 8 46.5 42.5 21.5 0 0.039 32 With Rod Boot h Symbol P RR S U Z ZZ Bore size (mm) B3 f

KJ

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Table of Contents

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

JIS Standard Hydraulic Cylinder

stroke 50 52 55 15 15 M10 x 1.25 25 to 1400 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 45 25 16 63 65 55 15 20 M12 x 1.5 25 to 1500 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 63 40 20 80 65 17 20 80 M16 x 1.5 25 to 1800 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 72 40 20 1/4 stroke 100 80 19 15 100 M18 x 1.5 25 to 1800 135 102 19 42 22 44 44 3/4 75 192 20 50 40

CRQ2

of rotating range Without inner rubber bumper Fluoro grease 10, 15, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

Table of Contents

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Battery-less

20 0 1 2 3 4 0 15 10 5 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 5 10 15 20 0 1 2 3 4 0 15 10 5 0 15 10 5 20 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

ZP

B25 B30 10 15 20 25 30 Blast type: Work pieces can be removed easily.

C85

64(71) 4.5 8.1 65(72) 13 38 26 4 20 6 4 12 27 25 18.5 2 15 3.2 75(79) 5.5 12.1 76(80) 18 58 38 6 25 8 6 16 27 25 18.5 2 15 3.2 82(82) 5.5 12.1 82(82) 18 58 38 6 25 8 6 20 30 32 24.1 4 20 4 95 6.6 16.1 90 20 66 46 6 32 8 8 25 30 32 24.1 4 20 4 104 6.6 16.1 97 24 66 46 6 32 8 ( ): In the case of air cushion. 6-11-15 15 Series C85 Dimensions [First angle projection] Double acting, Single rod

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CA2

to 500 30 27 60 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 84 15 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 15 85 98 up to 600 20 to 600 35 32 27 64 20 40 10 17 M10 x 1.25 7 M18 x 1.5 31 3/8 18 102 116 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 11 M22 x 1.5 37 1/2 25 up to 750 20 to 750 40 37 116 41 92 30 52 14 21 M12 x 1.75 11 M26 x 1.5

LEC-OM02704CN

*CDV 1 116384 (1) 1/9 CMX/CDV 9 (2) CDVSTN 32767 (3) CMXCDV 10 (A37) PA06PA07116384 nm PA06 PA07 15 74 15 (a) 1 5020 PA0650 PA0720 50 20 (b) 2 50201/9 50 20 50 450 1 9 20 PA06450 PA0720 20 1/9 15 75 15 (7) PA08 ATU 0001h PA09 RSP 12 132 8.2 (a) (PA08) PA08 0 0 0 PB0 8 PB0 9 PB 1 0 0 PB0 6 PB0 7 PB0 8 PB0 9 PB 10 PB0 6 1 1 PB0 7 PB0 8 PB0 9 PB 1 0 2 2 3 .

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

58[65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1[76.1] Approx. 300 (Lead wire length) 80.6[82.8] Pg7 90.6 70.8[73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 704 for dimensions with connector cable. 689 Series 10-SYJ700 Manifold specifications Manifold specifications For internal pilot Type 20 Type 21 Type 40 Type 41 Type

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

, 20, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

ZP

, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 45 25 16 55 15 15 25 to 1400 63 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 63 40 20 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 72 40 20 80 17 20 25 to 1800 100 M18 x 1.5 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod series Tolerances (

MY1

FC a Work piece Shock absorber EY EC FH a 2.5 4.5 6 4 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) W 60 70 90 100 T 7 12 15 15 S 46.7 67.3 73.2 73.2 h 3.5 4.5 5.5 5.5 FW 46 56 74 74 FH 12 16 22 22 FC 13 17 22 22 FB 33 43 57 57 F 6 6 8 8 EY 47.5 57.5 73 87 EC 6.5 8.5 11.5 12 EB 49 57 74 82 EA 10 10 12 15 E 20 20 25 31 Applicable cylinder MY1B20 MY1B25 MY1B32 MY1B40 Shock absorber model

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 27 32 32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32 40 40 52 52 22 27 27 32 41 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40

ZP

4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 5 Series ZPT Vacuum Pad: Vertical