--1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A
9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H
9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H
38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3 32 47 48 55 157 MXW8-50 71 4 30 46 76 53 182 Note) Adjuster
88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500 21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F
E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5 43 21.5 -B12 M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B 8 M8 x 1.25 -B10 M10 x 1.5 80 83 58 85
Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4
SU) S SF A AA YB effective depth YC 2 YA View (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 6.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 7.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 75.4 70 7.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9
W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs)
D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63
150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs
3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3
10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
Page 13 T-interface M5 x 0.8 1/8, 1/4, 3/8, 1/2 Page 13 Redirects the air flow. Pressure switch with piping adapter Compact switch and piping adapter integrated into one piece. Page 14 1/8, 1/4, 3/8, 1/2, 3/4 Check valve Page 15 1/8, 1/4, 3/8 Prevents back flow from lubricator.
Piping: 41R (Base Mounted), Stations: 13 Stations, A, B Port: N3T (5/32" One-touch Fitting)
Stations: 13 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: None, CE Compliant: No
Manifold Type: 42 (Base Mounted), Valve Stations: 13 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)
Manifold Type: 41 (Base Mounted), Valve Stations: 13 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)
Series: 1 (VQZ1000), Stations: 13 Stations, Port Size: N3T (5/32" One-touch Fitting)