Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Series SV

SV2000 SV3000 SV1000 SV4000 Refer to page 14. EX250-SDN1 EX250-SPR1 EX250-IE1 EX250-IE2 EX250-IE3 EX250-EA1 SV1000-78A Refer to page 32.

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Red 6 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 L dimension 26 2 1 25 17.6 19.9 22.1 24.4 26.6 28.9 31.1 33.4 35.6 Weight (g) 37.9 10 11 12 13 14 15 16 17 18 19 No.

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

CXS

x 0.8 with depth 7.5 2-6.9 through 2-11 counterbore with depth 6.3 14 2-M6 x 1.0 (Through) M6 x 1.0 x 14 (Hexagon socket head cap screw) M6 x 1.0 x 18.5 (Hexagon head bolt) M6 x 1.0 (Hexagon nut) 4-M5 x 0.8 with depth 7.5 30 (Z) 15 9 13 8.5 (30) (Z) 6 2-M8 x 1.25 with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5



(Mounting hole) (Mounting thread) 4-M6 x 1 x 6 Rc 1 1/4 2-Rc1, 1 1/4 VEX1930 3-14, 20 Bracket (Option) Pressure gauge (Option) Air operated type Rc 1/8 2-M5 x 0.8 Rc 2 2-Rc 1 1/2, 2 4-M6 x 1 x12 (Mounting thread) (Mounting hole) 14-6-10 11 Precision Regulator Series VEX130 3 Base Mounted M5, Rc 1/8 VEX1B33-M5, 01 F.R.L.

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

CNG

TE TF TH TZ TT TV TW TX TY XA XB P J 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 29 14 11 10 5.5 25 3.2 35.8 42 16 28 43.4 3 12 M4 x 0.7 39.8 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 33 16 13 10 5.5 30 3.2 42 20 28 48 3 12 M5 x 0.8 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6

Tamper Proof and Flat Head Screw

across flats) D3 D4 A1 L5 A2 L6 T Metric sizes A1 A2 T M1 L1 L2 D4 D2 D3 d Model H D1 L3 L5 L6 L4 ASD230F-M5-04T 12.9 29.4 4 9.3 17.5 M5 x 0.8 28.4 7.8 11.7 4.5 9.6 10 8 31 0.7 30.7 ASD230F-M5-06T 13.7 32.5 11.6 6 20.6 ASD330F-01-06ST 14 13.7 38.5 11.6 6 22.9 38.9 R 1/8 32 10.6 7 11.8 14.2 12 1.5 35.6 ASD330F-01-08ST 15.8 18.5 44.8 15.2 8 28.2 38.2 ASD430F-02-06ST 17 43.5 12.8 6 25.2 18

MHZ

depth 10 (Mounting hole) M5 x 0.8 (Finger closing port) 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) Auto Switch Mounting Groove Dimensions 15 5 9 Auto switch mounting groove (Both sides) 10 8.5 4 23 14 For single action, the port on one side is a breathing hole. 2.1 12-2-49 49 Series MHZJ2 Dimensions MHZJ2-25 Double acting/Single acting Basic type 0.05 36.5

MHZ

When closed 26 When open 48 0.1 D113 (122) 2-M6 x 1 thread depth 13 (Mounting thread) 204-M6 x 1 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 24 Auto Switch Mounting Groove Dimensions 15 0 0.05 7 6.2 11 Auto switch mounting groove 14 5 31 (37) (For D-Y) For single action, the port on one side is a breathing hole. 4 11.5 24 Auto switch mounting

Cylinder with Lock Series CNG

PH PL S CD CZ L RR TE TF TH TZ TT TV TW TX TY XA XB J 2 10 3.2 28 M4 x 0.7 35.8 5 6 24 65 29 14 11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

KA

Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 X 0.8 M6 X 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 17 KAH04-M5 M5 X 0.8 M6 X 1.0 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 18.5 13.5 KAH04-U01 5 14 10 10 16 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 18.5 KAH06-M5 M5 X 0.8 M6 X 1.0 15 14 4 4 11.5 3 10 KAH06-M6 19 1 8 14.5 KAH06-U01 5 12 6 19.5 17 1 4 13 17 14 12 KAH06

CNG

PH PL S CD CZ L RR TE TF TH TZ TT TV TW TX TY XA XB J 2 10 3.2 28 M4 x 0.7 35.8 5 6 24 65 29 14 11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18