Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

ARM10/11

L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

VR4151/4152

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

44

17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

CEx-OMB0060

Counter operation 21 7-3-1. Handling data range 21 7-3-2. Reset and hold input 21 7-3-3. Correspondence of banks and bank terminals at switching 21 7-3-4. Correspondence of preset numbers and output terminals 21 7-3-5. Output 22 7-3-6. Preset output forms list 23 7-3-7. Output timing chart 24 7-4. Memory (E2ROM) 26 Chapter 8: RS-232C Communication Functions 8-1.

Air Cylinder NCA1 Series

Stop Tube 21 Options Auto Switch Options 22 Table of Thread Form Codes / XA Options 22 Option XC3 Port and Cushion Location 23 Construction / Parts List / Seal Kit 23 Accessories Eye Brackets, Clevis Brackets, Rod Clevises, Rod Eyes, Pin, 24 Alignment Couplers, Rod Jam Nut Air Cylinder Expanded Series NCA1 Air Cylinder Series NCA1-EX MATERIAL SPECIFICATIONS MEDIUM DUTY XTAT Bore Size 5

NCA1

Stop Tube 21 Options Auto Switch Options 22 Table of Thread Form Codes / XA Options 22 Option XC3 Port and Cushion Location 23 Construction / Parts List / Seal Kit 23 Accessories Eye Brackets, Clevis Brackets, Rod Clevises, Rod Eyes, Pin, 24 Alignment Couplers, Rod Jam Nut Air Cylinder Expanded Series NCA1 Air Cylinder Series NCA1-EX MATERIAL SPECIFICATIONS MEDIUM DUTY XTAT Bore Size 5 6

EXxx-OMY0004

Table 21-2 i-Parameter parameter errors AddValue (hex) Error cause Remedy 03F2 iPar_CRC is incorrect. Check i-Parameters. Repeat calculation. 03FD PST_Device_ID is incorrect. Contact SMC 104 No.EX##-OMY0004 21.

HRX-OM-W032

Fig. 3-11 Wiring of the external switch (PNP open collector output) (example) HRS Series 3.3 Installation 3-21 HRX-OM-W032 Chapter 3 Transport and Setting Up Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.21 Communication Function.

EXxx-OMY0006CN

-2 iAddValue (hex) 03F2 iPar_CRC i03FD PST_Device_ID 104 No.EX##-OMY0006CN 21.E SI / Checklist / EX245-FPS1 HW/SW 01/1.1.1 2021 1 29 No.

4-channel Flow Monitor ( compatible)

CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23 24

Type: 21 (Common SUP/Individual EXH), Stations: 16, Bracket: None, Thread: 00N (NPT)

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 02, Type: 1 (Common Exhaust), Thread: 00N (NPT)

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Type: 21 (Common SUP/Individual EXH), Stations: 03, Bracket: None, Thread: 00N (NPT)

Type: 21 (Common SUP/Individual EXH), Stations: 06, Bracket: None, Thread: 00N (NPT)

Type: 21 (Common SUP/Individual EXH), Stations: 05, Bracket: None, Thread: 00N (NPT)