Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

CM2

CM2 H L 40 F A J 150 Standard DM2 C H L 40 F A J C73 150 With auto switch Rod boot Without rod boot Nylon tarpaulin Heat resistant tarpaulin Bore size 20mm 25mm 32mm 40mm Air cylinder with auto switch 20 25 32 40 Number of auto switches S n J K 2 1 n Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switches.

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

ZPT/ZPX

M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B8 M8 x 1.25 -B10 M10 x 1.5 27.5 80 83 58.4 85.1 37 48.5 -B12 M12 x 1.75 -B16 M16 x 1.5 13-11-87 6 Series ZPT ZPT HB-A16 (Male thread) 100 125 100 125 ZPT HB-B (Female thread) M16 x 1.5 Hexagon width across flats 22 Rc 1/8 6 6 Hexagon width across flats 24 70 25 70 Width across flats 60 4-M5 x 0.8 G 4-M5 x 0.8 11 11 G Width across flats 60 F F E E Y Y Courtesy

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Thermo-chiller

The indicated value is in (C). e [PRS] lamp Turns ON when the pressure is indicated by q. The indicated value is in (MPa). r [FLOW] lamp Not used in this product t [DI] lamp Turns ON when electric conductivity is indicated by q.

45

SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side. (Factory assembled spacer will be shipped with the orientation shown in the figure.)

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

IR1000/2000/3000

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !