Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: S (Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector w/o Cable), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector w/o Cable), Surge Suppressor: None, Manual Override: D (Screwdriver Operated Style), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter: Ø4, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Pipe Port Type: M, Port Size: M5, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Manual Override: None, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector w/o Cable, Surge Suppressor: Light & Surge Suppressor, Manual Override: Manually Operated, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector w/o Cable, Surge Suppressor: None, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

CATALOG

(Except for latching type and 100/110VAC) ACCESSORIES MANIFOLD OPTIONS VVQ1000-F7-L E L B O W F I T T I N G S A S S E M B LY VVQ1000-N7 Station (1Max. Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. !

V

(Except for latching type and 100/110VAC) ACCESSORIES MANIFOLD OPTIONS VVQ1000-F7-L E L B O W F I T T I N G S A S S E M B LY VVQ1000-N7 Station (1Max. Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. !

0.4

VVQ1000-50A-N7 Applicable tubing 5/16" VVQ1000-51A-N9 Note) A-side energization: A light (Orange) illuminates.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

PFxx-OMJ0005CN

C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3