4-channel Flow Monitor ( compatible)

Error output -11No.PF-OMA1011-A Term Definition F A mode in which setting of functions is performed. If any function settings need to be changed from the factory default, each setting can be selected with "F".

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

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r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"OF='-'-F===""--, I I LE OIAUI I BIeC!

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10

Digital Flow Switch Series PFA For Air Series PFW For Water

Note 6) The flow rate unit is based on 0C and 101.3kPa. 2 For Air Digital Flow Switch Series PFA How to Order PFA5 Remote Type Sensor Unit 10 01 Wiring specification Flow rate range 3m lead wire with connector Without lead wire Nil N 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min Nil N F 10 50 11 21 51 Port size Thread type Size Applicable model Flow rate (l/min)

IZ-OMU0031-CN

1]OUT1[F 2]OUT2 P_1 H_1 [kv] ON OFF [] <> 1 [P_1] -16No.IZ*-OMU0031 1 1 [P_2] -17No.IZ*-OMU0031 2[F 0] [F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21 [F 3] 25 mm 22 [F 4] 1 23 [F 5] ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF

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I f "n pcs I Non-rotating rod Standard Auto switch See ctalDg N302 for avajlabie Rod boot'r.

PF-OMN0011_C

1]OUT1(26)[F 2]OUT2(34) -21No.PF-OMN0011CN-C 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(26)[F 2]OUT2(34) 28 (23 ) -22No.PF-OMN0011CN-C 2 [F 0] [F] 2 2 [F 0] 25 4 L/min [F 1] OUT1 26 ON OFF 50% 5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

IDG

Note 2) They are not applicable in case the thread type is N or F.

VCW

Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

TA301

A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.