Micro Mechanical Valve Series VM1000

Max. 6 R port (3 port only) (62) 32 24 16 Symbol 2 port (A) 2 12 10 1 (P) 30 (A) 2 3 port 17 44 25.4 10.5 12 10 1 (P) 3 (R) 2 x 4.6 mounting hole 14 8.5 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Roller plunger VM122-M5-06A VM132-M5-06A VM122-M5-06SA VM132-M5-06SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across flats 17 10

ZX

Without switch and filter ZX1-K6 Filter unit (F) ZX1--K6-F Spacer 1 (For side mounting) 69.4 1 11.5 7 1 41 20 51 8 Bracket B (Standard accessory) 3.6 (Mounting hole) 2-R1.8 (Mounting hole) (Mounting hole) 19 8.8 1 10 4.8 Filter unit 35.4 (Mounting hole) 1 M5 (or M6) (V port) Vacuum pad connection port 5.4 (Mounting hole) 13-2-25 25 Air supply for supply valve pilot Air supply for release

CQ2

M5 X 0.8 Rc(PT)1/8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Screw-in style Piping 6/4 8/6 8/6 6/4(2) With built-in One-touch fitting Rod end male thread Rear boss mount Note 1) When requring style without auto switch, only 5 stroke uses M5 X 0.8.

SYJ3000/5000/7000

M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74

0.4

M5 C4 2-position 3-position exhaust center IN side port size OUT side port size Option Nil 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None With bracket M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

Table of Contents

44 52 1 2 5 34 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

ISO Cylinder

Bore size AM BE C CD EE EW F G H (HR) K KK KV KW NA ND RR SW U (WH) 8 12 M12 x 1.25 4 4 M5 x 0.8 8 12 7 28 13.4 M4 x 0.7 19 6 15 12 10 7 6 16 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 7 28 14.2 M4 x 0.7 19 6 15 12 10 7 6 16 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5

ZP3

polyurethane tubing Barb fitting U4 For 4 soft tubing U6 For 6 soft tubing 5 E E A10 M10 x 1 A12 M12 x 1 A B F Model A B C2 D E F Vacuum inlet direction q Pad dia.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type of actuation Coil rated voltage M5 01 M5 x 0.8 Electrical entry 0 Standard

Stability of suction position,

x 1 M5 x 0.8/ Effective thread depth 5 M10 x 1 M5 x 0.8/ Effective thread depth 5 9.5 9.5 9.5 M10 x 1 15 44.6 14.5 44.1 Seal washer Seal washer Seal washer 26.5 3 40 31 31 26 2 26 2.5 Width across flats 6 35 32 6 43 40 6 Width across flats 6 53 50 6 Width across flats 6 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/

MY1

Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm Load (kg) m m m Moment (Nm) F M = F x L M = F x L M = F x L F F L L L 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

MXQ

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12.5 (Adjuster at extension end) 28 24.5 58 49 3.5 24 29 24.5 14.5 5H9 depth 5 +0.030 0 1 F 6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H

CJ2

1 !

Proposals for Energy Saving

8, M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Enclosure IP40 Note 1) For vacuum operation, a momentary pressure of 0.5MPa will not be a problem.

Table of Contents

M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

MY1

5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R port 1/8 P port 1/8 Stations P, R port thread type A port size 02 : 20 2 Stations : 20 Stations A A M5 01 M5 x 0.8 1/8 Nil Rc G NPT NPTF CE-compliant F N T A port M5 x 0.8, 1/8 Nil Q CE-compliant Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

A

1 1 1/2 7 5/8 1.57 2.72 1 3/8 7 3/8 400 (4) 3/4-16 1 1/8 2 1/4 1 1/4 1 1/2 1/2 15/64 1/2 3/4 1.18 4 1/2 3 1/2 1/2 7/8 5/8 6 7/8 D I M E N S I O N S F R O N T F L A N G E T Y P E NC A1F + = Stroke addition EA F FB TF W Y P BORE (INCH) KK A AA B BA C D DD E EE G J R WF LF ZB MM UF 0.3 2 3/4 1.71 2.36 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 1/4-28 2 1.26 1.1 1.43 1 3 5/8 4 3/4 5/8 3 3/8

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !