Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 2 (200VAC 50/60Hz), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

High Vacuum Angle Valve

Dimensions XLC-100/160-1-X152: Air operated (b) D C E E C E Fn (KF flange) Fd (K flange) (a) (c) J H K [mm] Model A B C D E1 Fn Fd G H J K XLC-100-1-X152 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160-1-X152 138 339 200 65 11 190 180 153 124 62 12.5 B A 1 The E dimension applies when the heater option is included.

MY1

M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 U section detail dimensions P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc

Modular Design with Uniform Body Style

: Z) Round type pressure gauge (with color zone) P1 P2 A B C*1 D E F G J K H J H J H J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M28 x 1 40 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M38 x 1.5 55 26.5 3.5 37.5 63 37.5 64 37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M42 x 1.5 80 35.5 42.5 73 42.5 73 42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M42

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

fittings Rod end male thread With rubber bumper Through-hole (Standard) Mounting Both ends tapped style Built-in magnet JIS Symbol Double acting, double rod (1) M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Piping Screw-in type Rod end male thread Note 1) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8