Prevents Micro-Bubbles

Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.

JXCx-OMT0061CN

(P.59) 9.3 / RWw0,bit0: (10.1.2 (2) [OUT] (P.41) )ON 29 - 9.4 () (ON )No. 1 2 *1 *2 *2 : -: *1 1 *2 1 14.3 (P.64) 9.5 CC-Link Sub Function()Address(/)DATA() 9.5.1 (P.30) 14.4 (P.65) 9.5.1 Sub Function() DATA() DATA() (Sub Address DATA(H) DATA(L) DATA(H) DATA(L) Function) (01)h 1 (1 ) (02)h 2 (2 (2 ) ) (11)h 1 (1 ) (1 ) (12)h 2 (2 (2 (2 (2 ) ) ) ) Address(/) LECPMJ

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Direct Solenoid

NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7." Bottom(s] 7 1 6 DIRECTIONAL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 4$14 NVS 4l14.{!0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

Series AP500

Installation unit gauge port Pressure range Unit Regulator Code 2) Part number 3) Lower mount material Select compatible materials of construction for the gas Gas V15 V3 L 1 H V2 2 4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig

AS-FG/ASD-FG

2 Stainless Steel Series AS-FG Construction/Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 Parts list No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

width across flats) AS-D AS-T ASP ASN AQ ASV AK Metric Size Inch Size VCHC Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

LEC-OM07605CN

_ LD77MH_ FX3U-20SSC-H .2 (A4) Ab.

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

ZP3

polyurethane tubing Barb fitting U4 For 4 soft tubing Width across flats H G J Rotating K Non-rotating Width across flats E C (Buffer body) Model 2 2 B D A B C D E F G H Vacuum inlet direction q Pad dia.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

Hydraulic

Keeper plate Material: Rolled steel Rod end nut Material: Carbon steel 30 d JIS class 2 thread 2-d l 0.2 B D C m T H H B Bore size (mm) Bore size (mm) Cap bolt Rod series Part no.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W CS1 AL 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26 M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(

OMU0023

0010 000B 01 0F 0010 000B Instruction to execute the operation of Step Data No. 2 13 02 0206 sent. 14 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

(Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Series IP65 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order How to Order Rated pressure range ISE20C 0.1 to 1 MPa ISE20CH 0.1 to 2 MPa M For positive pressure ISE20C 02 X For vacuum/ compound pressure ZSE20C X M 02 q w e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts