CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area JIS symbol AS221FM-01 AS231FM-01 Models AS121FM AS131FM AS221FM-02 AS231FM-02 6, 8 3.2, 4 3.2, 4, 6 8, 10 4 6 Metric size 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Silver, Body: Red Handle: Red Residual relief 3 port valve X116 Port size Body size Piping direction Left 1(P) Right 1(P) Thread type 02 1 4 Nil Rc 4 5 3 4 1 2 03 VHS40 3 8 0 1 N NPT 04 1 2 F G 06 VHS50 3 4 Applicable port size: 1/4, 3/8 Example of Operating Circuit JIS Symbol When using the valve, please refer to the table of applicable effective areas for the respective exhaust ports

7ND9071en

Ex ia, II 1 D Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C

Lightweight and Compact

Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1

Lubrication Equipment

M5 1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

VXZ

Normally open VXZ 2232 02 1 G N.O.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

F F F F F Bore size 20 Bore size 25 800 8 3 7 6 5 4 8 3 7 1 6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Vacuum

:s 'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ;x E !

Vacuum

:s 'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ?

PF2A/PF2W

Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.

Thermo-chiller

D-G

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Controlled flow Free flow Model Port size Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 340 0.94 250 0.7 115 1/4 1/4 810 2.3 0.35 0.2 810 2.3 130 3/8 1/4 1670 4.6 1670 4.6 225 3/8 1/2 Note

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge