COQ2BP

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

MXF

6 5.5 6.5 25 H Data 9.8 4-M4 x 0.7 A Section AA M 10 Operating port 2-M5 x 0.8 (Table length) 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5 H 25 3H9 depth 3 +0.025 0 23 4 3H9 depth 3 +0.025 0 (mm) Z M J I H N ZZ Model MXF12-20 65 65 36 11 22 4 76 MXF12-30 75 75 45 12 30 4 86 MXF12-50 111 111 80 13 65 6 122 8-6-11 12 Series MXF Dimensions: MXF16 Stroke adjuster at

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

Magnetically Coupled Rodless Cylinder

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Compact Cylinder

Q 2 x P (Rc, NPT, G) (Port size) 4 x N through H thread effective depth C I D M E Z A + Stroke B + Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F

Fast switching valve: ON: 2.5ms OFF: 3ms; Large flow: up to 330 L/min; Enclosure: IP67; Available as 3-port and 5-port configuration; Standard M8 electrical connection; Power saving: 1.5W (Inrush: 6W, holding 1.5W)

Fast switching valve: ON: 2.5ms OFF: 3ms; Large flow: up to 330 L/min; Enclosure: IP67; Available as 3-port and 5-port configuration; Standard M8 electrical connection; Power saving: 1.5W (Inrush: 6W, holding 1.5W)

HRX-OM-O021

3.7.1 Reading of the External switch . 3-22 3.7.2 Wiring . 3-23 3.7.3 Setting items . 3-24 Chapter 4 Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the

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S~__ Red I I I I I j I I : IWhite : Main .;.. I ( ain l ack switch 'i' switch I element el ent I I I Vz I I I ~-= , e I I I L __ _ _ ___ ~_ I I ' I .~k J Major Dimensions Clamp Cylinder: Series CKS1 3-1/ 4 +Stroke H Speed controller Cushion valve " " .5 ~ ..,.._ . ", 5 ' !

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection S type: White color L type: Black color Applicable tubing diameter N Applicable tubing diameter E (Mounting hole) B C D E F G H Model A Applicable tubing diameter J ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

CJ2X/CUX/CQSX/CQ2X/CM2X

: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 6, 8 8, 10 6 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min (ANR)) 7 12 38 Controlled flow -X Effective area (mm2) 0.1 0.6 0.2 Air flow (l/min (ANR)) 175 350 75 295 Free flow 20Effective area (mm2) 1.1 5.3 2.7 4.5 Note) Supply pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 8, 10 6 6, 8 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

, , . , ' ' , , L type plug connector (L) 6 -9 1 ; * J'-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

&snac

F O T I D G 3 7 I D G E L 3 H F O T I D G 3 H1 E N 4 0 0 U l e s e t T u b e c o n n e c t i o n D o r t for purse air e]-!-q-U.!-! a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ?

Title not found

, , . , ' ' , , L type plug connector (L) 6 -9 1 ; * J'-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!

VEX1

2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710 VEX5711 1 4 1 4 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 13 105.5 103.5 18 4-M6 X 1 X depth 6 136.5 60 17 82 c Bracket mounting dimensions h Grommet terminal i Conduit terminal g Grommet j DIN connector a Model b d e f VEX5510 VEX5511 19 130 110

HRL

G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Fluid contact material (Metal/Resin) CH1: Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Fluororesin, PP, PBT, POM, PU, PC, PVC, EPDM, NBR CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin,