High Purity Chemical Valve

Symbol Nil U Single type Unit type with 2 way valve Metric sizes 03 04 06 3 4 6 LQ2 integral fitting Inch sizes 03 05 07 1/8 3/16 1/4 Options Basic size With reducer M With flow rate adjustment The flow rate is adjusted by controlling the diaphragm stroke.

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Modular Type Regulators Series AR

ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Note 7) NPN output: Wiring top entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] Note 7) PNP output: Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Note 7) PNP output: Wiring top entry Note 1) Assembly of a bracket and set nuts Note 2) Assembly of a bracket and 2 mounting screws Note 3) Please consult with SMC regarding

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Series VQ Base Mounted Metal Seal/Rubber Seal

LO: L plug connector G: Grommet 2 position double 2 SX With lead wire Without connector 3 position closed center VK 3 VZ M: M plug connector MO: M plug connector With lead wire 3 position exhaust center VF Without connector 4 1 set (F kit 7 station manifold base No.) 3 set (Single solenoid No.) 2 set (Double solenoid No.) 2 set (3 position solenoid No.)

KB

Different Diameter Module: KBR Component module T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size VMG KBR2-1 KBR3-2 KBR4-3 KBV2-06 KBL2-R2S 4 Plug/Cap: KBP, KBC (P . 15-3-117) Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

(Including O-ring for element) 5 m EP910-005N EP020-005N EP120-005N EP220-005N EP820-005N 10 m EP910-010N EP020-010N EP120-010N EP220-010N EP820-010N 20 m EP910-020N EP020-020N EP120-020N EP220-020N EP820-020N Element size 55 x 90 74 x 117 74 x 195 88 x 282 119 x 280 Port size 03 (3/8B), 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) FH FH HOW Note) For

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

M Body Size Model A B C D E F G H I J K L M N ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 15.5 14.4 8.5 50 15 12.5 24 17.5 26 53 22.5 48 Metric size Inch size Collar part arrow 15.2 6 8 17.5 16.6 9.5 61 16 13.5 27 19.5 28 65 24.5 52 Transparent cover 57 8 10 18 18.5 11 21.5 65 29.5 21 17 69.5 27 14.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 19.7 17.7

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series MB/CA1 Body ported Series CJ2 Series CM2 Tube x Length T0604 x 1 m VQZ1151-01 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T0806 x 1 m VQZ2151-02 Speed controller AS3001F-06 AS3001F-08 Silencer AN200-02 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m VQZ3151-03 Speed controller AS3001F

AR Series Modular Type Regulator

Cannot be used with M: Round pressure gauge (with color zone). Available by request for special.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123

0.4

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Construction Conditions Base mounted Series CJ2 Series CM2 Series MB, CA2 Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer T0604 x 1 m AS3002F-06 AN110-01 SQ1000 AN20-02 AS4002F-10 T0604 x 1 m AS3002F-06 T1075 x 1 m T1209 x 1 m SQ2000 Front matter 2 EX510 Gateway-type Serial Transmission System Plug-in

Pressure Relief 3 Port Valve With Locking Holes

or less 3.0N-m or less 3.0N-m or less 3.5N-m or less A (Flame resistant PBT 76g 127g 247g 293g 532g Mass (Handle / Bonnet material) B (Aluminum) 92g 156g 301g 349g 630g (2) Double action type Model VHS2510 VHS3510 VHS4510 VHS4510-06 VHS5510 Fluid Air Ambient and fluid temperature -5 to 60oC (No freezing) Proof pressure 1.5MPa Operating pressure range 0.1 to 1.0MPa Color (Standard) Handle:

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.