V100

r e w q r e w q VG VP S070 VQ VKF N.C.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

-D VFS410-E Non plug-in type VV5FS4-10 With multi-connector, or with D-sub connector: 8 stations max.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

M W Model M L H L E E LQ3U11 LQ3U12 LQ3U21 LQ3U31 LQ3U32 LQ3U41 LQ3U51 LQ3U61 4 3 6 10 8 12 19 25 10 14 44.5 11 46.5 9 10 (E,E) (E,E) 14 20 55 16 57 16 17 L,L 18 25 73 21 79 19.5 22.5 22 30 36 29 37 49 84 98 113.5 24 32 41 88 103 122 22 24 26 24 26.5 30 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material PVDF dimensions W: Width across flats

Air Cylinder Series CM2

L N NA NN P RR U E Bore size 0 0.033 0 0.033 0 0.033 0 0.039 8 1 20 8 13 8 10 9 18 5 62 24 41 6 30 15 24 14 28 13 9 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 8 13 10 10 9 22 62 30 45 8 30 15 30 14 17 9 6 26 5.5 M26 x 1.5 137 146 19.5 10.5 33.5 M10 x 1.25 8 1 32 8 13 12 10 9 22 64 30 45 10 30 15 14 17 9 6 26 5.5 M26 x 1.5 139 148 19.5 10.5 37.5 M10 x 1.25 34.5 4 1 40 11 16 14

e

1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3

AC Servo Motor Driver (Network card type ）

V/100 pulses) (Note 2) _ _ 0 7 Servo motor-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 0 8 Servo motor-side droop pulses (10 V/10 pulses) (Note 2) _ _ 0 9 Servo motor-side droop pulses (10 V/10 pulses) (Note 2) _ _ 0 D Bus voltage (200 V class and 100 V class: +8 V/400 V, 400 V class: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses

Air Cylinder Series CA2

E D e d Width across flats B1 f 10.2 l + Stroke + Stroke + Stroke Air release h + l C B ZZ + l + Stroke (mm) Stroke range (mm) A Bore size (mm) AL B B1 C CDH10 CX D E F G H1 J K KA Without rod boot With rod boot +0.058 0 -0.1 -0.3 10 15 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 -0.1 -0.3 12 18 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7

Table of Contents

1 e + !

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

A

NPT A mm B mm C mm S Y M B O L S NAMF150-N02 14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D

5 Port Solenoid Valve

7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

Table of Contents

hole) 1.5 IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse 5A Voltage selector B 220V INPUT 200V 230V 240V E D 4-5.5 x 10 long hole F Input cord 2 m Transformer part no.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Aluminum High Vacuum Angle Valve

) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A, B port Applicable valve model Base model Wiring A, B Stations P , EA, EB With terminal block With multi-connector With D-sub connector Grommet terminal DIN terminal 2 to 10 Plug-in type VV5FR4-01(-Q) VFR40-F(-Q) 2 to 8 VFR41-E VFR41-D(-Q) VFR44-G VFR44-E VFR44-T VFR44-D(-Q) Non plug-in type VV5FR4-10(-Q) 1 2 3 8, 1 2 Side/Bottom 2 to 10 Grommet Grommet terminal Conduit terminal

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.