CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

Compact Cylinder with Lock Series CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

HRX-OM-Q026

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% -20 to -5 Ethylene glycol aqueous solution 40(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)%

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

KR

KR-10C KR-12C 15.5 9 17 9 20.8 10.5 22.8 10.5 8 10 12 When tube insert parts are in line as KQU Union Y, use KRC1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

5 $3 y!7 @8 !4 !

Mechanically Jointed Rodless Cylinder Series MY1

x g X Z Y m x g x X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

SMC Pneumatic Clean Series

M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55

VEX1

chamber is blocked at the A port of VEXY Y.

ARM10/11

1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure

Table of Contents

Note 1) For power consumption of AC type, refer to page 2-4-10. Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

ARM10/11

1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure

17

16 10 16 28.5 12 20 55 280 Rc1/16 264 48 16 11 32 40 Rc1/4 100 85 12 18.5 9 59 23.5 14 20 35 14 67 340 Rc1/8 40 23.5 322 60.5 24 12 35 47 Port Variations Bottom Ported MY1BG Y Y Head cover piping connection can be freely selected to best suit different piping conditions.

Low Profile Guide Type

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static Moment Ceiling mounting Horizontal mounting Wall mounting M2 M1 M1 M2 M2 M3 y x y x z x Y Y X X X Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M3 M1 CY3B CY3R m3 x g x Z m1 x g x Y m2 x g x Y

Compact Manifold Regulator

1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil X17 Symbol Nil X17 VBA VBAT AP100 Straight type Straight type Elbow type Elbow type 6.5 X X 12.5 X X Y Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3 11.5 19 19 20 8, 5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Wall mounting y x y x z MY1H40-500Z Wb: MGGLB25-200 (4.35 kg) 3. Ceiling mounting 4. Vertical mounting x z y x y z Wc: MHL2-16D1 (795 g) Wa: Connection plate t = 10 (880 g) Wd: Workpiece (500 g) Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types. 2.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5