Flame Resistant

0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

ARJ310

0.7 0.7 0.7 0.6 0.6 0.6 Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure

Miniature Regulator Series ARJ310

0.7 0.7 0.7 0.6 0.6 0.6 Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Digital Flow Switch

3000 L/min 6000 L/min 12000 L/min 30 L/min 3000 L/min PF3A703H 3150 L/min 30 L/min 0 L/min 3150 L/min 60 L/min 6000 L/min PF3A706H 6300 L/min 60 L/min 6300 L/min 0 L/min 120 L/min 12000 L/min 12600 L/min 12600 L/min PF3A712H 120 L/min 0 L/min Rated flow range Set point range Display range Analog Output Output Output Flow/Analog Output 0 L/min A*2 B Voltage output (1 to 5 V)*1 1 V 1.04 V

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

CL

MNB h + l Z + l + Stroke ZZ + l + Stroke ZZ +Stroke Z +Stroke S +Stroke CNA CNS 125 to 160 CLS CLQ With rod boot A Rc BP lock-up port Unlocked when pressurized CD hole H10 Axis d9 B Rc BP lock-up port 2-Rc P MLGP Width across flats KA RLQ MLU EA D e ML1C Plug cap 2 positions l Dh + l Z + l + Stroke Z + Stroke S + Stroke ZZ + l + Stroke ZZ + Stroke -X 20Data Stroke range (mm) Bore size (

SYJ300/500/700

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry (A) 2 (A) 2 DC AC 50/60 Hz 24, 12, 6, 5, 3 Coil rated voltage (V) 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation 1 (P) 3 (R) 1 (P) 3 (R) Standard With power saving

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

CNA

T K ZZ + l + Stroke h + l C FT BN N CLS B H M S + Stroke ZZ + Stroke CLQ Long stroke (50 to 100) 4-FD MLGP RLQ MLU FY BF RY e d ML1C 8 f l ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8

CNA

T K ZZ + l + Stroke h + l C FT BN N CLS B H M S + Stroke ZZ + Stroke CLQ Long stroke (50 to 100) 4-FD MLGP RLQ MLU FY BF RY e d ML1C 8 f l ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.

CL

l Applicable bore size (mm) Part no.

KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

S Couplers Series KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

10

Bore size [mm] Dd9 L l m d Part no.

7ND9071en

11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.