Table of Contents

-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

AZ1000

Vespel is a registered trademark of DuPont. 33 Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm) Series AZ1500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AZ15 S FV4 FV4 02 2PW Delivery pressure Bonnet option

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.

CE

CV MVGQ CC Preset values A B Preset values Allowable values Allowable values RB Counting direction Counting direction ( + ) () ( + ) () J When moving in (+) direction OUT When moving in (+) direction OUT D-X When moving in () direction OUT When moving in () direction OUT 20Data 10-12-33 33 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal

Tie-rod Type Hydraulic Cylinder

Ht A 33 B Approx. Hs G 1/2 (applicable cable O.D. 6.8 to 9.6) D-G39/K39 D-A3 56 34 B 36 A 49 Auto switch G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs D-A44 56 B 36 Auto switch 49 A Approx.

CE

CV MVGQ CC Preset values A B Preset values Allowable values Allowable values RB Counting direction Counting direction ( + ) () ( + ) () J When moving in (+) direction OUT When moving in (+) direction OUT D-X When moving in () direction OUT When moving in () direction OUT 20Data 10-12-33 33 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

SFOD-OMT0005CN

RSLogix5000 4.4 EtherNet/IP . 22 5 . 23 5.1 PWR . 23 5.2 MOT:ENC: . 23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33

CE

B H NTJ-015A NT-02 NT-04 NT-05 M5 x 0.8 7.8 9.2 12 8 4 H B M8 x 1.25 12.5 15.0 20 13 5 M14 x 1.5 21.0 25.4 32, 40 22 8 M18 x 1.5 26 31.2 50, 63 27 11 Electrical Wiring Input/Output The input/output of the scale cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.

Dedicated Controller

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

AC Servo Motor Driver (CC-Link Type)

The verified result is displayed. -33- 5.3.9 Parameter initialization If you want to initialize parameters in the driver, please perform "Set to Default". When you initialize the parameters, parameters can not be undone. Please be sure to save the parameters in use. (Refer to LECSC Operation Manual (Simplified Edition), section 5.8.1 for the parameter storage method.)

AC Servo Motor Driver (SSCNET Type)

-33- 6.6 Positioning Mode in Setup Software From the Test Mode menu of the Setup Software select Positioning Mode. Select The Move Distance Unit Click OK. (When using this function, external input signal operation will be disabled. When controlling from a PLC or upper level device, the power must be turned off and then on.) The Positioning Mode window opens.

VX

The models VX31/32/33 have been revised. For details, please refer to catalog no. ES70-26A. Similar updating for other VX series are scheduled to follow shortly. Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B Rated voltage (1) VX solenoid coil assembly 02 =+4 7> 01 =+4 7> Electrical option Application 03 =+4 7> Nil # 04 =+4 7> > -/& S 5 % * ,* -05 ( !

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

Compact and Lightweight

10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or