CG1-OM0227

PTFE X446 GR-F-005(5g) 1) 25 2) () 5. 11. 26 6. 12. 27 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

Please contact us for the latest version.sales@ocaire.com, O-RING FOR VXD2140H-04N-5G, VALVE, VXD/VXZ NO SIZE RATING, .00044 lb

This is a legacy product, and replaced byVK334V-5G, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, 2A, VK300 NO SIZE RATING, .18373 lb

AKH/AKB Series

Male Connector Type Can be mounted directly onto equipment Straight Type Easily installed in pipe lines Symbol Can be used for vacuum (100kPa) IN OUT IN OUT Free flow direction Check direction Compact & Light weight With One-touch fitting Valve Outside diameter: 11.6mm Overall length: 37.1mm Weight: 5g (for AKH06-00) Reduces piping labor Low cracking pressure: 0.005MPa Large effective area

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

VT317

Example 1) In the case of VT317-001GB-05 Example 2) In the case of PVT317-5G Caution When the rated voltage is AC and if it is assembled with the coil for DC, response may be delayed and occur malfunction. Also, for DC valves, when the coil for AC is assembled, it occurs malfunction. For AC valves, assemble the coil for AC, and for DC valves, assemble the coil for DC.

AKH/AKB Series Check Valve with One-touch Fitting

Male Connector Type Can be mounted directly onto equipment Straight Type Easily installed in pipe lines Symbol Can be used for vacuum (100kPa) IN OUT IN OUT Free flow direction Check direction Compact & Light weight With One-touch fitting Valve Outside diameter: 11.6mm Overall length: 37.1mm Weight: 5g (for AKH06-00) Reduces piping labor Low cracking pressure: 0.005MPa Large effective area

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Note With pins With pins Note 1) Mounting nuts are not included with the integrated clevis, single clevis, and double clevis types. Note 2) Trunnion nuts are included with the front trunnion and rear trunnion types.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(Example) NW3J3-2OO3 NVJ312-5LZ-M3.2 vJ300-10-2A. ...1 NW3J3-42R-O3.B3T NVJ314R-5G 2 vJ300-10-1A.r Ifupe and. How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

standard) 0.1W(with power saving circuit) 0.1W(with power saving circuit) Sonic conductance:C 0.042 [dm3/(s bar)] Sonic conductance:C 0.042 [dm3/(s bar)] Single unit Manifold Base mounted Body ported Base mounted Body ported Bar stock type Stacking type Meeting miniaturisation needs of analysers, medical equipment and semiconductor manufacturing equipment Series S070 Extremely light weight 5g

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.