VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

1

pin) socket Note 1) Input connector Input channel 2 channels (1 channel/connector) Supplied voltage 24 VDC Max. supplied current 0.5 A/connector Protection Short-circuit protection Input Output 0 to 20 mA, 4 to 20 mA 0 to 10 V, 1 to 5 V, 0 to 5 V 12 bit resolution Input signal range 20 to 20 mA 10 to 10 V, 5 to 5 V 16 bit resolution EX600-AXA 22 mA Note 2) 15 V Max. rated input signal 50

2

Note 3) Max. number of rotations Metric size Inch size Elbow type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Model Port size Seal method AS12l1FSl-M5l M5 x 0.8 Gasket seal V V V V V V V 8 AS12l1FSl-U10/32l 10-32UNF V V V V V V V AS22l1FSl-l01 1/8 V V V V V V V V V AS22l1FSl-l02 1/4 V V V V V V V V V V R NPT Note 1) Sealant AS32l1FSl-l02 1/4 V V V V V V V AS32l1FSl-l03 3/

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mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

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10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Air Slide Table

75Z 10 10 V = mm/s V = mm/s 9 9 8 8 Load mass m [kg] Load mass m [kg] 7 7 6 6 V = 100 V = 100 5 5 4 4 V = 200 V = 200 3 3 V = 300 V = 300 2 2 V = 500 V = 500 1 1 0 0 10 20 30 40 50 60 70 80 0 0 20 40 60 80 100 120 140 L3: Overhang Allowable range: 80 mm L3: Overhang Allowable range: 140 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ25(A)-100Z MXQ25(A)-125, 150Z 10 10 V = mm/s

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X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

5

D-M9W(V) D-M9A(V) 4.5 5 4.5 5.5 5 5.5 20 25 32 40 50 63 80 100 D-H7/H7mW D-H7NF 4 4 4.5 5 6 6.5 REA D-H7C 7 8.5 9 10 9.5 10.5 D-G5/G5W/G59F D-G5BA/K59/K59W 4 4 4.5 5 6 6.5 6.5 7 D-A9(V) 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C 8 10 9 10 10 11 REB D-G5NT 4 4 4.5 5 6 6.5 6.5 7 D-G5NB 35 40 40 45 45 45 45 50 D-B5/B64 8 10 9 10 10 11 11 11 D-B59W 13 13 14 14 14 17 16 18 REC * Values which

Battery-less

216 421 127 265 519 Power [W]*10 2.9 5 5 5 Rated voltage [V] 24 VDC 10% Lock unit specifications *1 Horizontal: The maximum value of the work load.

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

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point L (mm) Gripping point L (mm) 15 15 5 5 10 10 20 20 25 25 30 30 MHW F F MRHQ MHS3-20D MHS3-20D 40 Pressure 0.6 MPa Misc. 35 Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm

Smooth Cylinder/Low Speed Cylinder

D-X 1211 Series CG1Y Auto Switch Mounting 2 Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-A9 (V) D-M9 (V) D-M9W (V) D-M9A (V) 7 6 8 8 8 9 4.5 5 4.5 5.5 5 5.5 D-C7/C80 D-C73C/C80C 9 10 10 11 10 8 D-B5/B64 D-B59W 9 10 10 11 11 11 10 8 18 14 14 14 17 16 13 13 D-H7/H7mW D-H7NF 4.5 5 6 6.5 4 4 D-H7C 9 10 9.5 10.5 8.5 7 D-G5/G5W/G59F D-G5BA/K59/K59W 7 4.5

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10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load

Compact 5-Port Solenoid Valve

(A)4 2(B) 4(A) 2(B) 6 0.91 V 3(EB) (EA)5 1 (P) 24 VDC 5(EA) 3(EB) 1(P) JSY3000 N.O. valve x 2 pcs. 3-position closed center (A)4 2(B) 2(B) 4(A) 8 2.77 V V 10 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) JSY5000 3-position exhaust center N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) (A)4 2(B) 12 6.59 V V 12 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) V Standard v Option G Made to Order Manifold Options MIndividual

Air Cylinder

V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8

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Table (3) Rated Voltage Electrical Option Class B Solenoid valve (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Rated voltage S L Z VX21 Model VX22 VX23 Voltage symbol Voltage With surge voltage suppressor With light and surge voltage suppressor With light AC/ DC 01 ( ) 1 8 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5

A

10 32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5

Air Cylinder

V V V V V V V Note 10) Note 10) Note 10) Long st Long stroke V V V V v V V V D Built-in magnet V V V V V V V V CG1lF With One-touch fittings Note 15) 20 to 63 V v v v v v v v CG1l-lJ K With rod boot 20 to 100 V V V V v v v v Note 11) Note 11) Note 11) Note 11) CG1lH Air-hydro type 20 to 63 V V 10-, 11Clean series 20 to 100 V V V V v Note 1) Note 1) 25ANote 9) Copper (Cu) and Zinc (Zn)-free

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[kg] Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600