Slider Type/Ball Bushing Bearing

Do not adjust strokes by moving the stopper, as this can cause cylinder damage.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40

KT10

Do not put the heavy objects on the products. Do not use the products as scaffold. 2. Do not use the products in conditions that do not meet the product specifications. Product Returns When returning the product to SMC, make sure to properly purge to remove all hazardous materials and return the product complying with SMC specified procedures.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Note 13) Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 2 mm of both ends. Note 14) For the manufacture of intermediate strokes, please contact SMC.

80

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these. 2. Do not use in explosive atmospheres. 3. Do not use in locations subject to vibration or impact. 4. Do not use in locations where radiated heat will be received from nearby heat sources. 5.

Process Pump

Do not use liquids that will cause the wetted sealant to swell.

SL5200

Do not put the heavy objects on the products. Do not use the products as scaffold. 2. Do not use the products in conditions that do not meet the product specifications. Product Returns When returning the product to SMC, make sure to properly purge to remove all hazardous materials and return the product complying with SMC specified procedures.

VFS

16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

energy saving effect

through until it comes out the other side. 4) Do not get across steps with casters.

53

Do not grip the piping port on the back side or the handles of the panel. 3. Do not pass over bumps etc. with the casters.

10

Caution Food zone Not installable Do not use air grippers in a food-related environment. Splash zone Installable Food zone Food may directly contact with air grippers, and is treated as food products. Splash zone Food may directly contact with air grippers, but is not treated as food products. Non-food zone Air grippers do not directly contact food.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

DOC1020530

(If you do not the power to OFF, it does not reflect the data in the driver.) Note2) Selected Items Write: It writes the parameter values of the corresponding frame to the driver. Single Axis Write: It writes all of the parameters to the driver. Note3) Do not change For manufacturer setting parameters.

Fluoropolymer Piping Equipment

5.8 LQ1T4A-R8 1/4" 1/4" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R10 1/4" 1/2" 1/4" 6 15 24 15 9 18 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T4A-R17 1/4" 3/8" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R20 3/8" 1/4" 1/2" 6 24 24 9 18 21 21 43 38.5 43 28 28 3.6 LQ1T4A-R33 1/8" 1/2" 1/8" 15 24 15 14 21 14 33 43 33 16.5 28 16.5 1.8 LQ1T5A-R2 3/4" 3/8" 3/4" 7

Nozzle Type Ionizer

Do not use an air containing mist or dust. The air containing mist or dust will cause the performance to decrease and shorten the maintenance cycle.

Thermo-chiller

Do not grip the piping port on the back side or the handles of the panel. 3. Do not pass over bumps, etc., with the casters.

Digital Flow Switch

Do not release the OUT side piping port of the product to the atmosphere without connecting piping.

Air Pilot Operated Series NVSA

Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

Soft Start-up Valve AV2000/3000/4000/5000 1

Then, rotate the needle clockwise from the fully closed position. 14-3-2 3 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Light/Surge Voltage Suppressor Piping Caution Caution 1.