MU MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.
67 63 92 130 139 102 9 9 90 CEP1 Bore size (mm) Rear flange style: RZQG FZ L M 4-FD CE1 32 65 18 34 CE2 40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5
118 92 5.5 62 8 56 40 L B + Full stroke FX FZ AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange type/RZQG FZ L M 4-FD 65 18 34 32 72 18 40 40 90 22 50 50 108 28 60 63 FV M M L B + Full stroke FT FZ AH + Full stroke Double clevis type/RZQD (mm) Double clevis CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5
(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2. PSI:O.2 Can be programmed for a hysteresis mode, window comparator mode. or reversed output of these respective modes.
Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet) (Outlet) AP30 00 2PW FV4 FV4 S Model Option Code Cv 0.23 0.28 Code Specification Indicator switch 3) 00 02
1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?
1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?
175st 25st or less Over 175st 42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)
101 100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4
0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure
X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.
16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2
16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load
Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -
. 40 200 32 Caution 100 Handling Precautions 1.
MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153
to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196
500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22