FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

VDW

1 o w !0 !1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Gun Type Ionizer

and replacement of emitters 5 q Removal of nozzle w Removal of emitter q Turn counterclockwise. w Pull forward to remove. q Turn counterclockwise. w Pull forward to remove. 6 Bypass nozzle (Option) OSHA1910.242b compliant Even if the nozzle is obstructed, the main orifice pressure cannot exceed 30 psi (210 kPa). * Supply pressure: 0.5 MPa or less 180 Gun Type Ionizer IZG10 Series Application

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !

IDG

e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

S070

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

VY511, VYU5

(Use an auto switch rated 24V DC, with a minimum amperage capacity of 10mA.) q q q w w w e e e r (Unit: N) Bore size (mm) 40 50 63 80 100 Operation r Min. sensing weight 26 40 62 100 160 Warning Back-up of the balance pressure data The balance pressure data is backed up by the controller for approximately 5 minutes during a power outage or when the power supply has been turned OFF.

High Purity Fluoropolymer

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

Soft Start-up Valve AV2000/3000/4000/5000 1

Pressure time chart (Meter-out control) example Pressure conditions Cylinder drive circuit (Meter-out control) example Working condition Pilot valve VBA When pilot valve w is turned ON by energization or manual override, the pilot air pushes piston A e and main valve q downwardand opens main valve q while R port closes simultaneously.

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

CC

RS Q G Model IX IY W H Sectional secondary moment Low noise (Slide screw type) RS H A Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 70 122 151 70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30