CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

-fl Seies

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 1213 A MY1H Series Construction End lock !9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

Power Clamp Cylinder

1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !0 Socket head cap screw CKZN-D063 Note 2) Kits for changing opening angle of arm w Stopper bolt r Bumper !1 Seal washer 63 CKZN-B063 Note 2) CKZN-D063 CKZN-B063 CKZN-K063 Note 2) q Switch actuator o Spring washer !

IR1000/2000/3000

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Series VCL

terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57

V

E E N E X T P A G E Applicable Tube OD P Q R S H O W T O O R D E R S E E N E X T P A G E 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 Courtesy of Steven Engineering, Inc. !

Slider Type/Ball Bushing Bearing

Grease pack part no. for 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 25: GR-S-010 (10 g) Chrome molybdenum steel Urethane rubber Aluminum alloy Special resin Anodized 1530 CY1H Series Magnetically Coupled Rodless Cylinder Linear Guide Type Construction Double axis type / CY1HT w !9 @0 !8 q !5 !4 !7 #3 !6 e #1 @9 i !0 !

Plug-in Unit

S kit can be used by connecting to gateway unit.

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

0.5

300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can

XL

Port S (10) remains pressurized and valve S (18) remains open.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

S 1 pc. Thread type Body option N n pcs.