Fieldbus system Ethernet POWERLINK compatible SI unit

BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.

Secondary Batteries

Nil S n 90 91 Material restriction With lub-retainer Port thread type Auto switch Nil Without auto switch (Built-in magnet) 16 M thread Rc NPT G Nii *For the applicable auto switch models, refer to the table below. 20, 25 TN TF Adjuster option Symmetric type Nil AS AT A BS Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end

Plate Cylinder with Lock Series MLU

+ Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8

Dedicated Controller Series LC1 Uniaxial Type

Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.

Air Pilot Operated Series NVSA

Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

NCX2 seies

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

Stations: 3 Stations, Port Size: B4 (Elbow Bottom Porting w/ø4 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 3 (Input Block 3 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: N [NPN (-)], Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Stations: 3 Stations, Port Size: N1 (1/8" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 0 (w/o Input Block), Input Block: w/o Input Block, Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 2 (Input Block 2 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D (DIN Rail Mounting), Option 2: None, US Option: X160US (Preferred US Option)

Stations: 8 Stations, Port Size: N1 (1/8" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 1 (M12, 2 Inputs), Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D0 (DIN Rail Mount w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Stations: 8 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 7 (Input Block 7 pcs.), Input Block: 2 (M12, 4 Inputs), Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D0N (DIN Rail Mount w/o DIN Rail, w/Name Plate), Option 2: R (External Pilot), US Option: X160US (Preferred US Option)

Stations: 8 Stations, Port Size: N1 (1/8" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 6 (Input Block 6 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: N [NPN (-)], Option 1: D (DIN Rail Mounting), Option 2: None, US Option: X160US (Preferred US Option)

Stations: 4 Stations, Port Size: N1 (1/8" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 0 (w/o Input Block), Input Block: w/o Input Block, Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Stations: 5 Stations, Port Size: C4 (ø4 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 4 (Input Block 4 pcs.), Input Block: 2 (M12, 4 Inputs), Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D0N (DIN Rail Mount w/o DIN Rail, w/Name Plate), Option 2: R (External Pilot), US Option: X160US (Preferred US Option)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 0 (w/o Input Block), Input Block: w/o Input Block, Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: D (DIN Rail Mounting), Option 2: None, US Option: X160US (Preferred US Option)

Stations: 4 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)], Option 1: D (DIN Rail Mounting), Option 2: None, US Option: X160US (Preferred US Option)