&snac

. c o m p o n e n t e q u r p m e ' r t s N O M o d e I D e s c r i p t i 0 n0ty 'lA F M 2 O M i s t s e 0 a r d t 0 rT l-c) {tc) e ( M i n i m u m c l e a r a n 0 t 1 0 0 ) A i r D r a i L A F D 2 O Micro lltist seoarator t 3 I D G 3 , 3 HMernb r dne a ir dryerI I D G 5 , 5 H 4 A R 2 O R e g u l a t 0 r L P u r s i n s 5 Y 2 O L s p a c e r v / i t h L s h a p e d b r d c k e t ?

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

Combination Cylinder

2 !3 !4 !5 !6 !

Cylinder with Lock

5 !6 @5 #9 #1 $4 #0 #2 B A #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 @2 w @7 #5 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs. 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.

Direct Solenoid

Includ6 body and (2) locklng 9tns. Eody Asdnbly-l/a. NF IF p.rt!. Inctuda body .nd (2) tocktno ths. sprir|oSt AXT0r&4 Spnig-spool rotlm xmosl0 of!!L-!!9qtq 4RP568414 5'Oool A s|erD Aas,y Galket-aolnold cov.r xTot1{l 1 spac.r AXT!1&5 1 cavr asldnbly-a"c. 3ol6nold. cnmB|3 ol cov.r, recsd no}tocking oplralor, and {4) dot, 12, Cdor a!.mt,y-A,C. tol.

CRBU

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

HRX-OM-I051

When using accessory [by-pass piping set] flow becomes total of flow on customer side and flow on by-pass (*2). HRZ Series 5.3 Operation Screen 5-3 HRX-OM-I051 Chapter 5 System Operation 5.3.3 Status screen 2 1 2 3 4 Figure 5-5 Status Screen 2 Table 5-4 Status Screen 2 No.

ALF400 to 900, ALT-5/-9

d e e F o t u A l e d o M 5 T L A N 2 ~ 1 * S I 5 T L A N 9 T L A N 2 ~ 1 * S I 9 T L A N e z i s e p i P , 4 / 1 : N I r i A 8 / 3 : T U O ) 3 m c ( z o y t i c a p a c l i O ) 0 0 0 5 ( 9 6 1 ) 0 0 0 5 ( 9 6 1 ) 0 0 0 9 ( 4 0 3 ) 0 0 0 9 ( 4 0 3 ) f g k ( s b l t h g i e W ) 6 . 2 1 ( 8 . 7 2 ) 2 . 3 1 ( 1 . 9 2 ) 0 . 6 2 ( 3 . 7 5 ) 6 . 6 2 ( 7 . 8 5 * n o i t a c i f i c e p s h c t i

Air Cylinder

(n 2) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 1 10 80 90 75 Different surfaces 20 100 75 80 90 100 100 100 Same surface D-A3<C D-G39C D-K39C 20 + 35 (n 2) 75 + 35 (n 2) 80 + 35 (n 2) 90 + 35 (n 2) Different surfaces (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) O 100 + 100 (n 2) 100 + 100 (n 2) Same surface (n = 2, 3, 4, 5

EX500

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.