ISO Standard Hydraulic Cylinder

3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

VER2000/4000

proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional

Plate Cylinder

Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7

M-E06-4-LQ3

) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only Table 1 Tubing Size Symbol Metric size Inch size Tubing O.D. 3 03 4 04 6 06 8 08 10 10 12 12 19 19 25 25 1/8" 03 1/4" 07 3/8" 11 1/2" 13 3/4" 19 1" 25 Symbol Note 1) GPS GB GB GPS Fitting type Note 1) Sizes with the same symbol number and 06 and 07 are common sizes. 6 c Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN

C95

12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H

Serial Network

: (952) 943-1299 Fax: (952) 943-1614 Austin Phone: (512)926-2646 Fax: (512) 836-1397 Romania Phone: 01-2552625 Fax: 01-2552630 Japan Phone: 03-3502-2740 Fax: 03-3508-2480 Malaysia Phone: 03-56350590 Fax: 03-56350602 Denmark Phone: 70252900 Fax: 70252901 Vancouver Phone: (604) 517-1646 Fax: (604) 517-1647 Nashville Phone: (615) 331-0020 Fax: (615) 331-9950 Boston Phone: (978) 326-3600 Fax:

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

pa

port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order VC 1 1 PA 3 03 3 PA3000 VDW VQ Port size Body size VX2 3 5 03 04 06 3/8 standard 1/2 standard 3/8(10A): PA3 1/2(15A): PA5 3/4(20A): PA5 VX Liquid contact body material VX3 Thread type 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Nil T Rc NPTF G NPT VXA

PFA/PFW

Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Instantaneous flow rate l/min Cumulative flow rate l Large flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10-2 ft3 x 10-1 ON CFM = ft3/min Window comparator mode NO OFF P-1 P-2 For water Large flow rate OUT1 Output mode Display Instantaneous flow rate l/min Cumulative flow rate l ON YES OUT2 is the

AN

B1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 VEX 04 1 2 Screw-in 06 3 4 1 4 10 1 AN 12 1 Model (One-touch fitting connection) 1 2 1 14 AMC C06 C08 C10 (6 One-touch fittings size) (8 One-touch fittings size) Model One -touch fitting size Effective area (mm2) Weight (g) Dimensions (mm) One-touch A B (10 One-touch fittings size) ANB1-C06 8 5 52 16 6 8 10 ANB1-C08 13 12

Shuttle Valve/AND Valve with One-Touch Fittings

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

Fieldbus System

.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 (Station 1) (Station n) 11.5 2 8 82.7 P 1 B 2 P 1 B 2 B 2 B 2 B 2 (56.6) 56.6 13.2 (For DIN rail mounting) 3/5 E 3/5 E 35.2 31.6 4 A 4 A 4 A 4 A 4 A 11.1 14.2 8.7 25 20.5 (Pitch) P = 19 (21.7) (10) (14.3) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 12, 1/2" Note 1) These figures show the SS5Y7-10S6Q22-05D-C10.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-S010

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-Q033

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Electric Actuators

Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Vertical Mount Specification Refer to Table below.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

body ZF ZP SP ZFB ZCUK Universal joint type Unrestricted 360 piping tube mounting 4, 6 4: 10 AMJ 8, 10 6: 30 P.1108 30 With one-touch fitting AMV 8: 50 3/16", 1/4" Light and compact molded resin parts 10: 75 AEP 3/8", 1/2" HEP Related Equipment ZFC 2, 3.2 2 : 2 IN/OUT straight piping 4, 6, 8 In-line type 3.2: 7 With one-touch fitting 4 : 10 P.1 10 Light and compact molded resin parts

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

LEC-OM069xx

The PC or PLC...etc may not be able to monitor a brief change in the P-OT or N-OT signal to P-OT=1 or N-OT=1.