tTV2000/3000

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NCMB 075-0400-XB7 ---E-Low tgmperatule Alto-switch capable not avaitable. (E Series NCM Piwt Bracket Rear Pivot Mount NCMC NC$-PCo75 31".%'..1%a".11/i' Pirsot Bracket (End Mount NCME) Series NCM Foot Bracket Rod Cleuis Jam Nut noart,reaat World Wide QS\E Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc.

LEF-OM006xx

e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.

PSE540/560

ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface With indicator E H V I G L H A V V M A U C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

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When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

ZSM1-115/121

E: Emitter Liquid contact part Wetted parts. Parts that are in contact with the process fluid. C: Collector B: Base B: Base E: Emitter C: Collector Load Electrical appliance connected to the output, e.g. relay, solenoid, etc. Fig. (1) NPN type Fig. (2) PNP type Operating humidity range Humidity range for normal operation.

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: ER (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + w/Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: ER (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut + w/Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: MR (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: MR (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + w/Manual Override for Residual Pressure Release)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: R (with Manual Override for Residual Pressure Release)