3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Dedicated Controller

F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller. LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

CE

36 23 6 50 4-5.5 7 64 8 Scale Cylinder Series CE1 12, 20, 32, 40, 50, 63 How to Order CE1 L 32 200 Mounting bracket Auto switch type Nil Without auto switch B L F G D Double end tapped (standard) Bore size Foot type Cable length 12 20 32 40 50 63 12mm Refer to the table below for auto switch part numbers.

Air Slide Table Series MXQ

23 30 140 170 210 250 315 385 35 10 10 40 26 + 0.2S 23 30 35 47 335 340 380 450 490 745 655 70 23 25 100 43 + 0.2S 40 53 60 75 605 610 670 735 835 1250 1400 1000 105 40 45 160 55 + 0.2S 65 120 115 170 1100 1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240 + 0.5S Option Specifications Stroke

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

1) 5 to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.

4-channel Flow Monitor ( compatible)

Error output -11No.PF-OMA1011-A Term Definition F A mode in which setting of functions is performed. If any function settings need to be changed from the factory default, each setting can be selected with "F".

10

F = One finger thrust.

MY1

MY3M EA h EB W F Stroke adjustment unit (Shock absorber stroke) T MY1W16/20 S F MY1W50/63 Shock absorber EY EC (mm) h E EB EC EY T EA S TT F Shock absorber model RB0806 W 58 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

EX600-DX_DY_DM_eng

22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group Pin

Transfer

DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8 x 1.25 LC 9.5 12 12 MD 9 11 14 LD 5.5 6.5 8.5

Stopper Cylinder

QA [mm] F 13 Tubing O.D. 6 B + Stroke R R 8 QB Stroke Q Bore size QA F Q QB QU QW 1.8 Stroke 20 Tubing O.D. QA F 13 KA KB Tubing O.D. 6 8 QB Stroke Q QU 32 6 7.5 20 13 38 60.5 40 6 8 24.5 13 42 68 50 8 9.5 26 16 50 82 29 1.8 Stroke 20 QW Tubing O.D. QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

AS-FG/ASD-FG

Note) Use Series AS-F with -X214 for the throttle valve.

3 Port Air Operated Valve Series SYJA300 1

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43